Plasma dynamics in an inductively coupled magnetic neutral loop discharge

Plasma Sources Science and Technology

Volumn 17, Issue 2, 2008, Pages

  O'Connell, D ^a,c   Gans, T ^a,c   Crintea, D L ^a   Czarnetzki, U ^a   Sadeghi, N ^b  

^a RUHR UNIVERSITY BOCHUM   (Germany)

^b UNIV GRENOBLE ALPES   (France)

^c QUEEN'S UNIVERSITY BELFAST   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPIC ETCHING; INDUCTIVELY COUPLED PLASMA; IONIZATION POTENTIAL; LANGMUIR PROBES; OPTICAL EMISSION SPECTROSCOPY;

LANGMUIR PROBE MEASUREMENTS; NEUTRAL GAS DEPLETION; NEUTRAL LOOP DISCHARGES (NLDS); PLASMA PRODUCTION REGION;

ELECTRIC DISCHARGES;

EID: 43149125414     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/17/2/024022     Document Type: Article

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