Studies on electron behaviors at downstream region of a neutral loop discharge plasma

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 20, Issue 6, 2002, Pages 1964-1968

  Sakoda, Tatsuya ^a   Sung, Youl Moon ^b  

^a SOJO UNIVERSITY   (Japan)

^b UNIVERSITY OF MIYAZAKI   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER CONCENTRATION; CURRENT DENSITY; ELECTRON SCATTERING; STAINLESS STEEL; VACUUM APPLICATIONS;

ELECTROMAGNETIC COILS;

PLASMA THEORY;

EID: 0036863229     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1513644     Document Type: Article

References (6)

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3. T. Sakoda, T. Miyao, K. Uchino, and K. Muraoka, Jpn. J. Appl. Phys., Part 1 36, 6981 (1997).
4. Y.M. Sung, K. Uchino, K. Muraoka, and T. Sakoda, J. Vac. Sci. Technol. A 18, 2149 (2000).
5. T. Sakoda, Y.O. Yirenkyi, Y.M. Sung, M. Otsubo, and C. Honda, Jpn. J. Appl. Phys., Part 1 40, 6607 (2001).
6. Y.O. Yirenkyi, Y.M. Sung, M. Otsubo, C. Honda, and T. Sakoda, J. Vac. Sci. Technol. A 19, 2590 (2001).