Neutral depletion and transport mechanisms in large-area high density plasma sources

Journal of Applied Physics

Volumn 86, Issue 10, 1999, Pages 5356-5364

  Tynan, G R ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001302632     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.371532     Document Type: Article

References (14)

1. G. R. Tynan et al., J. Vac. Sci. Technol. A 15, 2885 (1997).
2. T. Hori, M. D. Bowden, K. Uchino, K. Muraoka, and M. Maeda, J. Vac. Sci. Technol. A 14, 144 (1996).
3. P. W. Lee and H. Y. Chang, Phys. Lett. A 213, 186 (1996).
4. M. A. Lieberman and A. J. Lichtenburg, Principles of Plasma Discharges and Materials Processing (Wiley, New York, 1994).
5. D. F. Jephcott and P. M. Stoker, J. Fluid. Mech. 13, 587 (1962).
6. R. W. Boswell and K. Porteous, Appl Phys. Lett. 50, 1130 (1987).
7. D. A. Shapiro and H. B. Velentini, Contrib. Plasma Phys. 31, 391 (1991).
8. M. J. Hartig and M. J. Kushner, Appl. Phys. Lett. 62, 1564 (1993).
9. M. D. Kilgore, H. M. Wu, and D. B. Graves, J. Vac. Sci. Technol. B 12, 494 (1994).
10. J. Gilland, R. Breun, and R. N. Hershkowitz, Plasma Sources Sci. Technol. 7, 416 (1998).
11. F. F. Chen, Introduction to Plasma Physics, 2nd ed. (Plenum, New York, 1984), Vol. 1.
12. o. All of the quantities on the rhs have been measured or can be estimated from the experimental conditions.
13. 2 where r∼ 1.8 Å is the effective radius of the argon atom.
14. I. D. Sudit and F. F. Chen, Plasma Sources Sci. Technol. 3, 162 (1994).