Investigations of capacitively coupled neutral loop discharges (CCP-NLD) via PIC simulation

Journal of Physics D: Applied Physics

Volumn 40, Issue 2, 2007, Pages 510-519

  Vural, M ^a   Brinkmann, R P ^a  

^a RUHR UNIVERSITY BOCHUM   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRODES; MAGNETIC FIELDS; MONTE CARLO METHODS; THREE TERM CONTROL SYSTEMS; VACUUM TECHNOLOGY;

CAPACITIVELY COUPLED NEUTRAL LOOP DISCHARGES (CCP-NLD); MAGNETIC COILS; PLASMA DYNAMICS; VACUUM CHAMBERS;

ELECTRIC DISCHARGES;

EID: 33947694638     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/40/2/027     Document Type: Article

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