Quantum confinement effect in crystalline silicon quantum dots in silicon nitride grown using SiH4 and NH3

Applied Physics Letters

Volumn 88, Issue 12, 2006, Pages

  Kim, Tae Wook ^a   Cho, Chang Hee ^a   Kim, Baek Hyun ^a   Park, Seong Ju ^a  

^a Gwangju Institute of Science and Technology (GIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

DISSOCIATION; NITROGEN COMPOUNDS; PASSIVATION; PHOTOLUMINESCENCE; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILANES; SILICON NITRIDE; SURFACE PHENOMENA;

PRECURSORS; QUANTUM CONFINEMENT EFFECT; SILICON NITRIDE FILMS; SILICON QUANTUM DOTS;

SEMICONDUCTOR QUANTUM DOTS;

EID: 33645512438     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2187434     Document Type: Article

References (17)

1. A. G. Cullis and L. T. Canham, Nature (London) 353, 335 (1991).
2. W. L. Wilson, P. F. Szajowski, and L. E. Brus, Science 262, 1242 (1993).
3. Z. H. Lu, D. J. Lockwood, and J. M. Baribeau, Nature (London) 378, 258 (1995).
4. S. Fujita and N. Sugiyama, Appl. Phys. Lett. 74, 308 (1999).
5. N. M. Park, T. S. Kim, and S. J. Park, Appl. Phys. Lett. 78, 2575 (2001).
6. H. Tamura, M. Ruckschloss, T. Wirschem, and S. Veprek, Appl. Phys. Lett. 65, 1537 (1994).
7. L. Liao, X. Bao, X. Zheng, N. Li, and N. Min, Appl. Phys. Lett. 68, 850 (1996).
8. M. V. Wolkin, J. Jorne, and P. M. Fauchet, Phys. Rev. Lett. 82, 197 (1998).
9. J. S. Biteen, N. S. Lewis, H. A. Atwater, and A. Polman, Appl. Phys. Lett. 84, 5389 (2004).
10. N. M. Park, C. J. Choi, T. Y. Seong, and S. J. Park, Phys. Rev. Lett. 86, 1355 (2001).
11. Y. Q. Wang, Y. G. Wang, L. Cao, and Z. X. Cao, Appl. Phys. Lett. 83, 3474 (2003).
12. B. H. Kim, C. H. Cho, T. W. Kim, N. M. Park, G. Y. Sung, and S. J. Park, Appl. Phys. Lett. 86, 091908 (2005).
13. C. H. Cho, B. H. Kim, T. W. Kim, S. J. Park, N. M. Park, and G. Y. Sung, Appl. Phys. Lett. 86, 143107 (2005).
14. G. Allan, C. Delerue, and M. Lannoo, Appl. Phys. Lett. 71, 1189 (1997).
15. K. Nishio, J. Koga, T. Yamaguchi, and F. Yonezawa, Phys. Rev. B 67, 195304 (2003).
16. T. Y. Kim, N. M. Park, K. H. Kim, G. Y. Sung, Y. W. Ok, T. Y. Seong, and C. J. Choi, Appl. Phys. Lett. 85, 5355 (2004).
17. S. Sriraman, S. Agarwal, E. S. Aydil, and D. Maroudas, Nature (London) 418, 62 (2002).