Ion-beam synthesis of amorphous SiC films: Structural analysis and recrystallization

Journal of Applied Physics

Volumn 79, Issue 9, 1996, Pages 6907-6913

  Serre, C ^a   Calvo Barrio, L ^a   Perez Rodriguez A ^a   Romano Rodriguez A ^a   Morante, J R ^a   Pacaud, Y ^b   Kogler R ^b   Heera, V ^b   Skorupa, W ^b  

^a UNIVERSITY OF BARCELONA   (Spain)

^b INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000168868     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.361514     Document Type: Article

References (27)

1. H. Morkoç, S. Strite, G. B. Gao, M. E. Lin, B. Sverdlov, and M. Burns, J. Appl. Phys. 76, 1363 (1994).
2. P. G. Neudeck, J. Electron. Mater. 24, 283 (1995).
3. G. Müller, G. Krötz, and E. Niemann, Sensors Actuators A 43, 259 (1994).
4. A. Arbab, A. Spetz, and I. Lundström, Sensors and Actuators B 18-19, 562 (1994).
5. H. G. Bohn, J. M. Williams, C. J. McHargue, and G. M. Begun, J. Mater. Res. 2, 107 (1987).
6. J. A. Edmond, R. F. Davis, and S. P. Withrow, Ceram. Trans. 2, 479 (1989).
7. C. J. McHargue and J. M. Williams, Nucl. Instrum. Methods Phys. Res. B 80/81, 889 (1993).
8. V. Heera, J. Stoemenos, R. Kögler, and W. Skorupa, J. Appl. Phys. 77, 2999 (1995).
9. E. Ech-chamikh, E. L. Ameziane, A. Bennouna, M. Azizan, T. A. Nguyen Tan, and T. Lopez-Rios, Thin Solid Films 259, 18 (1995).
10. Ch. Wagner, G. Krötz, H. Sonntag, H. Möller, G. Müller, and S. Kalbitzer, 8th International Conference on Solid-State Sensors and Actuators (TRANSDUCERS'95) and EUROSENSORS IX, Stockholm, Sweden, June 1995, p. 186.
11. K. Mui and F. W. Smith, Phys. Rev. B 35, 8080 (1987).
12. T. Takeshita, Y. Kurata, and S. Hasegawa, J. Appl. Phys. 71, 5395 (1992).
13. A. Chehaidar, R. Carles, A. Zwick, C. Meunier, B. Cros, and J. Durand, J. Non-Cryst. Solids 169, 37 (1994).
14. W. Y. Lee, J. Appl. Phys. 51, 3365 (1980).
15. Y. Katayama, K. Usami, and T. Shimada, Philos. Mag. B 43, 283 (1981).
16. A. Sproul, D. R. McKenzie, and D. J. H. Cockayne, Philos. Mag. B 54, 113 (1986).
17. A. E. Kaloyeros, R. B. Rizk, and J. B. Woodhouse, Phys. Rev. B 38, 13099 (1988).
18. C. Meneghini, S. Pascarelli, F. Boscherini, S. Mobilio, and F. Evangelisti, J. Non-Cryst. Solids 137/138, 75 (1991).
19. N. Laidani, R. Capeletti, M. Elena, L. Guzman, G. Mariotto, A. Miotello, and P. M. Ossi, Thin Solid Films 223, 114 (1993).
20. J. F. Ziegler, J. P. Biersack, and U. Littmark, The Stopping and Range of Ions in Solids (Pergamon, New York, 1985), Vol. 1.
21. J. Pezoldt, B. Stottko, G. Kupris, and G. Ecke, Mater. Sci. Eng. B 29, 94 (1995).
22. J. Bullot and M. P. Schmidt, Phys. Status Solidi B 143, 345 (1987).
23. A. Pérez-Rodríguez, C. Serre, L. Calvo-Barrio, A. Romano-Rodríguez, J. R. Morante, Y. Pacaud, R. Kögler, and W. Skorupa, Proc. SPIE 1995, edited by S. V. Svechnikov and M. Ya. Valakh, Vol. 2648, p. 481.
24. L. R. Doolittle, Nucl. Instrum. Methods B 9, 344 (1985).
25. C. Serre, A. Pérez-Rodríguez, A. Romano-Rodríguez, J. R. Morante, R. Kögler, and W. Skorupa, J. Appl. Phys. 77, 2978 (1995).
26. R. C. Lee, C. R. Aita, and N. C. Tran, J. Vac. Sci. Technol. A 9, 1351 (1991).
27. F. Finocci, G. Galli, M. Parrinello, and C. M. Bertoni, Phys. Rev. Lett. 68, 3044 (1992).