Influence of Pt/Ti sputtering temperature on the orientation of CSD-derived Pb(Zr0.52Ti0.48)O3 thin films

Ferroelectrics

Volumn 357, Issue 1 PART 3, 2007, Pages 233-242

  Kobayashi, T ^a   Ichiki, M ^a   Maeda, R ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Film; Orientation; PZT; Sputter

Indexed keywords

FATIGUE CYCLES; FILM ORIENTATIONS; PEAK INTENSITY; PT(111); PZT; PZT FILM; REMANENT POLARIZATION; ROOM TEMPERATURE; SPUTTERING TEMPERATURE;

FERROELECTRICITY; LEAD; PIEZOELECTRIC ACTUATORS; PIEZOELECTRIC MATERIALS; PLATINUM; SEMICONDUCTING LEAD COMPOUNDS; ZIRCONIUM;

PLATINUM ALLOYS;

EID: 42549093231     PISSN: 00150193     EISSN: 15635112     Source Type: Journal    
DOI: 10.1080/00150190701545193     Document Type: Conference Paper

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