Linewidth measurement technique using through-focus optical images

Applied Optics

Volumn 47, Issue 4, 2008, Pages 495-503

  Attota, Ravikiran ^a   Silver, Richard ^a   Dixson, Ronald ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

IMAGE ANALYSIS; OPTICAL DATA PROCESSING; OPTICAL MICROSCOPY; SCANNING ELECTRON MICROSCOPY; SENSITIVITY ANALYSIS;

FOCUS METRIC (FM); LINEWIDTH MEASUREMENT TECHNIQUE; OPTICAL IMAGES;

LINEWIDTH;

EID: 41449094498     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.47.000495     Document Type: Article

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