Focus and edge detection algorithms and their relevance to the development of an optical overlay calibration standard

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3677, Issue I, 1999, Pages 95-106

  Fox, S ^a   Silver, R M ^a   Kornegay, E ^a   Dagenais, M ^a  

^a UNIVERSITY OF MARYLAND   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; CALIBRATION; EDGE DETECTION; MICROSCOPIC EXAMINATION; REGRESSION ANALYSIS; SCANNING; STANDARDS;

OVERLAY METROLOGY;

PHOTOLITHOGRAPHY;

EID: 0032677809     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.350794     Document Type: Conference Paper

References (14)