Through-focus technique for nano-scale grating pitch and linewidth analysis

Optics Express

Volumn 13, Issue 18, 2005, Pages 6699-6708

  Ku, Yi Sha ^a   Liu, An Shun ^a   Smith, Nigel ^b  

^a INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

^b Accent Optical Technologies   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

CURVE FITTING; FOCUSING; OPTICAL MICROSCOPY;

DIMENSIONS; FOCAL POSITIONS; FOCUS INDICATORS; PITCH;

DIFFRACTION GRATINGS;

EID: 24944586862     PISSN: 10944087     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OPEX.13.006699     Document Type: Article

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