Application of through-focus focus-metric analysis in high resolution optical metrology

Progress in Biomedical Optics and Imaging - Proceedings of SPIE

Volumn 5752, Issue III, 2005, Pages 1441-1449

  Attota, Ravikiran ^a   Silver, Richard M ^a   Germer, Thomas A ^a   Bishop, Michael ^b   Larrabee, Robert ^a   Stocker, Michael T ^a   Howard, Lowel ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^b SEMATECH   (United States)

Author keywords

CD metrology; Focus metric signature; High resolution optics; Optical aberrations; Optical characterization; Process control; Through focus analysis

Indexed keywords

CD METROLOGY; FOCUS METRIC SIGNATURE; HIGH RESOLUTION OPTICS; OPTICAL CHARACTERIZATION; THROUGH FOCUS ANALYSIS;

ABERRATIONS; DIFFRACTION GRATINGS; IMAGE ANALYSIS; INFORMATION ANALYSIS; MEASUREMENTS; METRIC SYSTEM; OPTICAL SYSTEMS; PROCESS CONTROL;

OPTICAL VARIABLES MEASUREMENT;

EID: 24644476489     PISSN: 16057422     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.621106     Document Type: Conference Paper

References (8)

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3. R. Attota, R. M. Silver, M. Bishop, E. Marx, J. Jun, M. Stocker, M. Davidson, and R. Larrabee, "Evaluation of New In-chip and Arrayed Line Overlay Target Designs," Proc. SPIE, 5375, p. 395 (2003).
4. R. M. Silver, R. Attota, M. Stocker, M. Bishop, J. Jun, E. Marx, M. Davidson, and R. Larrabee, "High resolution optical overlay metrology," Proc. SPIE 5375, p. 78 (2003).
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6. M. Davidson, "Analytic waveguide solutions and the coherence probe microscope," Proceedings of Microcircuit Engineering 90, Leuven, Belgium, September 1990.
7. R. M. Silver, M. Stocker, R. Attota, M. Bishop, J. Jun, E. Marx, M. Davidson, and R. Larrabee, "Calibration strategies for overlay and registration metrology," Proc. SPIE 5038, p. 103 (2003).
8. R. M. Silver, R. Attota, M. Stocker, M. Bishop, L. Howard, T. Germer, E. Marx, M. Davidson, and R. Larrabee, "High-resolution optical metrology," presented in Metrology Inspection and Process control for Microlithography XIX, SPIE, San Jose, CA (2005).