The limits of image-based optical metrology

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6152 I, Issue , 2006, Pages

  Silver, R M ^a   Barnes, B M ^a   Attota, R ^a   Jun, J ^a   Filliben, J ^a   Soto, J ^a   Stocker, M ^a   Lipscomb, P ^b   Marx, E ^a   Patrick, H J ^a   Dixson, R ^a   Larrabee, R ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^b SEMATECH   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

IMAGE-BASED OPTICAL METROLOGY; OPTICAL TECHNIQUES; RAYLEIGH RESOLUTION; SCATTERFIELD MICROSCOPY;

COMPUTER SIMULATION; ELECTROMAGNETIC WAVES; FEATURE EXTRACTION; IMAGE ANALYSIS; MEASUREMENT THEORY; OPTICAL MICROSCOPY; RAYLEIGH SCATTERING; STATISTICAL METHODS;

OPTICAL ENGINEERING;

EID: 33745635704     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.660289     Document Type: Conference Paper

References (11)

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