Modeling and prediction of the dynamic behaviour of microbeams under electrostatic load

Analog Integrated Circuits and Signal Processing

Volumn 40, Issue 2, 2004, Pages 155-164

  Brusa, Eugenio ^a   De Bona, Francesco ^a   Gugliotta, Antonio ^b   Somà, Aurelio ^b  

^a UNIVERSITY OF UDINE   (Italy)

^b POLITECNICO DI TORINO   (Italy)

Author keywords

Electrostatic actuation; Finite element method; MEMs; Microbeams; Structural dynamics

Indexed keywords

BANDPASS FILTERS; DEGREES OF FREEDOM (MECHANICS); ELECTRIC LOADS; ELECTROMAGNETIC FIELDS; ELECTROSTATIC ACTUATORS; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; OSCILLATORS (ELECTRONIC); RESONANCE;

DISCRETIZATION; ELECTROMECHANICAL COUPLING; MICROBEAMS; STRUCTURAL DYNAMICS;

MICROELECTROMECHANICAL DEVICES;

EID: 3142683157     PISSN: 09251030     EISSN: None     Source Type: Journal    
DOI: 10.1023/B:ALOG.0000032596.58984.0c     Document Type: Conference Paper

References (16)

1. S.D. Senturia, Microsystem Design. Kluwer Academic Publishers, 2000.
2. Tai-Ran Hsu, MEMs and Microsystems-Design and Manufacture. McGraw Hill, 2002.
3. C.T. Nguyen, "Micromechanical circuits for communication tranceivers." In Proc. IEEE-BCTM 8.2, pp.142-149.
4. C. Hoon and J. Keating, "Simulation based design for large displacement electrostatically actuated microrelay." In Proc. of the Symposium on Design Test Integration Packaging MEMs/MOEMs, SPIE, Cannes, 2001, pp. 130-137.
5. K. Lee, K. Kim, and C. Youn, "Numerical approach for frequency-shifting analysis of electrostatic micro-mechanical actuator." In Proc. of the Symposium on Design Test Integration Packaging MEMs/MOEMs, SPIE, Cannes, 2001, pp. 90-98.
6. S.R. Mukherjee, "Dynamic analysis of micro-electromechanical system." International Journal of Numerical Methods in Engineering, vol. 39, pp. 4119-4139, 1996.
7. G.K. Ananantasuresh, R. Gupta, and S. Senturia, "An approach to macromodeling of MEMS for nonlinear dynamic simulation." DSC-Vol.59, Micromechanical Systems (MEMS), ASME 1996, pp. 401-407.
8. M.I. Younis, E.M. Abdel-Rahman, and A. Nayfeh, "A reducedorder model for electrically actuated microbeam-based MEMS." J. of Microelectromechanical Systems, vol. 12, no. 5, pp. 672-680, 2003.
9. N.R. Aluru and J. White, "A coupled numerical technique for self-consistent analysis of MEMS." DSC-Vol.59, Micromechanical Systems (MEMS), ASME 1996, pp. 275-280.
10. G. Genta, Vibration of 'Structures and Machines. Springer Verlag, 2000.
11. A. Collenz, F. De Bona, A. Gugliotta, and A. Som̀a, "Large deflections of microbeams under electrostatic loads," J. Micromech. Microeng, vol. 14, pp. 365-373, 2004.
12. S.H. Crandall, D.C. Karnopp, and D.C. Pridmore-Brown, Dynamics of Mechanical and Electromechanical Systems. McGraw-Hill, 1968.
13. H. H. Woodson and J.R. Melcher, Electromechanical Dynamics. John Wiley & Sons, 1968.
14. O. Bochobza-Degani, D. Elata, and Y. Nemirovsky, "An efficient DIPIE algorithm for CAD of electrostatically actuated MEMS devices." Journal of Microelectromechanical Systems, vol. 11, no. 5, 2002.
15. M.S. Weinberg, C.E. Dubé, A. Petrovich, and A.M. Zapata, "Fluid damping in resonant flexural plate wave device." J. of Microelectromechanical Systems, vol. 12, no. 5, pp. 567-576, 2003.
16. S. Timoshenko, Strength of Materials. McGraw-Hill, 1956.