A novel bistable two-way actuated out-of-plane electrothermal microbridge

Journal of Microelectromechanical Systems

Volumn 17, Issue 1, 2008, Pages 58-69

  Michael, Aron ^a   Kwok, Chee Yee ^a   Yu, Kevin ^a   Mackenzie, Mark R ^a  

^a UNIVERSITY OF NEW SOUTH WALES   (Australia)

Author keywords

Bistable; Electrothermal; Microbridge; Out of plane actuation

Indexed keywords

ACTUATORS; COMPRESSIVE STRESS; COMPUTER SIMULATION; FINITE ELEMENT METHOD; MICROELECTROMECHANICAL DEVICES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; STIFFNESS; TORSIONAL STRESS;

ELECTROTHERMAL ANALYSIS; MICROBRIDGE; OUT-OF-PLANE ACTUATION; SWITCHING WAVEFORM;

BRIDGE CIRCUITS;

EID: 40449089856     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2007.911369     Document Type: Article

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