Bonding of silicon scanning mirror having vertical comb fingers

Journal of Micromechanics and Microengineering

Volumn 12, Issue 5, 2002, Pages 644-649

  Lee, Jin Ho ^a,b   Ko, Young Chul ^a   Choi, Byoung So ^a   Kim, Jong Min ^a   Jeon, Duk Young ^b  

^a Samsung Advanced Institute of Technology (SAIT)   (South Korea)

^b Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

BONDING; ELECTRODES; REACTIVE ION ETCHING; SILICON WAFERS; SUBSTRATES;

ANODIC BONDING; FLIP CHIP BONDING; SILICON SCANNING MIRROR; VERTICAL COMB FINGERS;

MIRRORS;

EID: 0036732313     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/12/5/320     Document Type: Article

References (10)

1. Laser display technology
2. Fabrication of silicon optical scanner for laser display
3. Milli-scale mirror actuator with bulk micromachined vertical combs
4. Design and fabrication of scanning mirror for laser display
5. Linear actuation of silicon scanning mirror for laser display
6. Mechanisms of anodic bonding of silicon to Pyrex glass
7. Fabrication of silicon-Pyrex-silicon stack by a.c. anodic bonding
8. Ion drift processes in Pyrex-type alkali-borosilicate glass during anodic bonding
9. Low-temperature intermediate Au-Si wafer bonding; eutectic or silicide bond