All-silicon bistable micromechanical fiber switch based on advanced bulk micromachining

IEEE Journal on Selected Topics in Quantum Electronics

Volumn 5, Issue 1, 1999, Pages 46-51

  Hoffmann, Martin ^a   Kopka, Peter ^a   Voges, Edgar ^a  

^a TU DORTMUND UNIVERSITY   (Germany)

Author keywords

Microactuators; Microelectromechanical devices; Micromachining; Optical arrays; Optical communication equipment; Optical fiber switches; Optical mems

Indexed keywords

CROSSTALK; ETCHING; INSERTION LOSSES; MICROACTUATORS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; OPTICAL COMMUNICATION EQUIPMENT; OPTICAL FIBERS; OPTOELECTRONIC DEVICES; POTASSIUM COMPOUNDS; SILICON WAFERS; THERMAL EXPANSION;

BIMATERIAL EFFECT; OPTICAL ARRAYS; POTASSIUM HYDROXIDE; SINGLE-MODE FIBERS (SMF);

OPTICAL SWITCHES;

EID: 0032655092     PISSN: 1077260X     EISSN: None     Source Type: Journal    
DOI: 10.1109/2944.748104     Document Type: Article

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