Effects of incorporation of Si or Hf on the microstructure and mechanical properties of Ti-Al-N films prepared by arc ion plating (AIP)

Surface and Coatings Technology

Volumn 202, Issue 14, 2008, Pages 3257-3262

  Feng, Changjie ^a,b   Zhu, Shenglong ^b   Li, Mingsheng ^c   Xin, Li ^b   Wang, Fuhui ^b  

^a NANCHANG HANGKONG UNIVERSITY   (China)

^b INSTITUTE OF METAL RESEARCH   (China)

^c Nanchang Normal University   (China)

Author keywords

Arc ion plating; Mechanical properties; Microstructure; Ti Al Hf N; Ti Al Si N

Indexed keywords

CRYSTAL ORIENTATION; CRYSTALLITE SIZE; HAFNIUM; MECHANICAL PROPERTIES; METALLOGRAPHIC MICROSTRUCTURE; MICROHARDNESS; PLATING; SILICON; WEAR RESISTANCE;

ARC ION PLATING;

STAINLESS STEEL;

CRYSTAL ORIENTATION; CRYSTALLITE SIZE; HAFNIUM; MECHANICAL PROPERTIES; METALLOGRAPHIC MICROSTRUCTURE; MICROHARDNESS; PLATING; SILICON; STAINLESS STEEL; WEAR RESISTANCE;

EID: 40249088323     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2007.11.036     Document Type: Article

References (58)

1. Cselle A., and Barimani A. Surf. Coat. Technol. 76-77 (1995) 712
2. He J.-W., Bai C.-D., Xu K.-W., and Hu N.-S. Surf. Coat. Technol. 74-75 (1995) 387
3. Patsalas P., Charitidis C., Logothetidis S., Dimitriadis C.A., and Valassiades O. J. Appl. Phys. 86 (1999) 5296
4. Münz W.D. J. Vac. Sci. Technol. A 4 (1986) 2717
5. Knotek O., Bohmer M., and Leyendecker T. J. Vac. Sci. Technol. A 4 (1986) 2695
6. McIntyre D., Greene J.E., Hakansson G., Sundgren J.-E., and Münz W.D. J. Appl. Phys. 67 3 (1990) 1542
7. PalDey S., and Deevi S.C. Mater. Sci. Eng. A 342 (2003) 58
8. Kang M.C., Park I.-W., and Kim K.H. Surf. Coat. Technol. 163-164 (2003) 734
9. Harris S.G., Doyle E.D., Vlasveld A.C., and Dolder P.J. Surf. Coat. Technol. 146-147 (2001) 305
10. Urbanski J.P., Koshy P., Dewes R.C., and Aspinwall D.K. Mater. Des. 21 (2000) 395
11. Veprek S. Surf. Coat. Technol. 97 (1997) 15
12. Veprek S., Reiprich S., and Shizi L. Appl. Phys. Lett. 66 20 (1995) 2640
13. Ma D., Ma S., and Xu K. Surf. Coat. Technol. 184 (2004) 182-187
14. Choi J.B., Cho K., Lee M.-H., and Kim K.H. Thin Solid Films 447-448 (2004) 365
15. Sun X., Reid J.S., Kolawa E., and Nicolet M.-A. J. Appl. Phys. 81 2 (1997) 656
16. Diserens M., Patscheider J., and Levy F. Surf. Coat. Technol. 120-121 (1999) 158
17. Le Brizoual L., Granier A., Clenet F., Briaud P., Lemperiere G., and Turban G. Surf. Coat. Technol. 116-119 (1999) 922
18. Mei F., Shao N., Hu X., et al. Mater. Lett. 59 (2005) 2442
19. Choi R., Park I.-W., Park J.H., and Kim K.H. Surf. Coat. Technol. 179 (2004) 89-94
20. Bendavid A., Martin P.J., Preston E.W., et al. Surf. Coat. Technol. 201 (2006) 4139
21. Carvalho S., Ribeiro E., Rebouta L., Vaz F., Alves E., and Schneider D. Surf. Coat. Technol. 174-175 (2003) 984
22. Park I.-W., Choi S.R., Suh J.H., Park C.-G., and Kima K.H. Thin Solid Films 447-448 (2004) 443
23. Park I., Choi S.R., Suh J.H., Park C., and Kim K.H. Thin Solid Films 447-448 (2004) 443
24. Jiang N., Shen Y.G., Zhang H.J., Bao S.N., and Houa X.Y. Mater. Sci.Eng. B 135 (2006) 1
25. Li Y.S., Shimada S., Kiyono H., and Hirose A. Acta Mater. 54 (2006) 2041
26. Johnson P.C. In: Francombe M.H., and Vossen J.L. (Eds). Contemporary Preparative Techniques (1989), Academic Press, London 129
27. Wang D.-Y., Chsng C.-L., Wong K.-W., et al. Surf.Coat. Technol. 120-121 (1999) 388
28. Lin K.-L., Chao W.-H., and Wu C.-D. Surf. Coat. Technol. 89 (1997) 279
29. Wu S.K., Lin H.C., and Liu P.L. Surf. Coat. Technol. 124 (2000) 97
30. Feng C., Li M., Xin L., et al. Oxid. Met. 65 (2006) 307
31. Donohue L.A., Lewis D.B., Münz W.D., et al. Vacuum 55 (1999) 109
32. Li M., Feng C., Wang F., and Wu W. Mat. Sci. Forum 546-549 (2007) 1789
33. Kutschej K., Fateh T.N., Mayrhofer P.H., Kathrein M., Polcik P., and Mitterer C. Surf. Coat. Technol. 200 (2005) 113
34. Klug H.P., and Alexander L.E. X-ray Diffraction Procedures (1974), Wiley, NewYork 306
35. Coll B.F., Fontana R., Gates A., and Sathrum P. Mater. Sci. Eng. A 140 (1991) 816
36. Lugscheider E., Knotek O., Loffler F., et al. Surf. Coat. Technol. 76/77 (1995) 700
37. Anders A. Appl. Phys. Lett. 80 (2002) 1100
38. Li M., and Wang F. Surf. Coat. Technol. 167 (2003) 197
39. Choi S.R., Park I.-W., Kim S.H., and Kim K.H. Thin Solid Films 447-448 (2004) 371
40. Aksyonov I.I., and Khoroshikh V.M. Review (1984), Atominform, Moscow 57
41. Tuma D.T., Chen C.I., and Davies D.K. J. Appl. Phy. 49 7 (1978) 3821
42. http://www.crct.polymtl.ca/FACT/documentation.
43. Kima J.S., Kima G.J., et al. Surf. Coat. Technol. 193 (2005) 249
44. Dong Y., Mei F., et al. Mater. Letter. 59 (2005) 171
45. Zhang P., Cai Z., and Xiong W. Surf. Coat. Technol. 201 (2007) 6819
46. Lugscheider E., Knotek O., Zimmermann H., and Hellman S. Surf.Coat. Technol. 116-119 (1999) 239
47. Xu Y., Li L., Cai X., and Chu P.K. Surf. Coat. Technol. 201 (2007) 6824
48. Chandra R., Kaur D., Chawla A.K., et al. Mater. Sci. Eng. A 423 (2006) 111
49. Christiansen S., Albrecht M., Strunk H.P., and Veprek S. J. Vac. Sci. Technol. B 16 1 (1998) 19
50. Kim S.H., Kim J.K., and Kim K.H. Thin Solid Films 420-421 (2002) 360
51. Pelleg J., Zevin L.Z., and Lungo S. Thin Solid Films 197 (1991) 117-128
52. Veprek S. J. Vac. Sci. Technol., A, Vac. Surf. Films 17 (1999) 2401
53. Lasalmonie A., and Strudel J.L. J. Mater. Sci. 21 (1986) 1837
54. Carvalho S., Rebouta L., Cavaleiro A., Rocha L.A., Gomes J., and Alves E. Thin Solid Films 398-399 (2001) 391
55. Petch N.J. J. Iron Steel Inst. 174 (1953) 25
56. Zhang S., Sun D., Fu Y., and Du H. Surf. Coat. Technol. 167 (2003) 113
57. Stelmashenko N.A., Walls M.G., Brown L.M., and Milman Y.V. Acta. Metal1. 4l (1993) 2855
58. McElhaney K.W., Vlassak J.J., and Nix W.D. J. Mater. Res. 13 (1998) l300