Effects of bias voltage and temperature on mechanical properties of Ti-Si-N coatings deposited by a hybrid system of arc ion plating and sputtering techniques

Thin Solid Films

Volumn 447-448, Issue , 2004, Pages 371-376

  Choi, Sung Ryong ^a   Park, In Wook ^a   Kim, Sang Ho ^b   Kim, Kwang Ho ^a  

^a Pusan National University   (South Korea)

^b Korea University of Technology and Education   (South Korea)

Author keywords

Bias voltage; Hybrid coating system; Mechanical properties; Microstructure; Temperature; Ti Si N

Indexed keywords

COATINGS; COMPRESSIVE STRESS; ELASTIC MODULI; ELECTRIC POTENTIAL; GRAIN GROWTH; INDENTATION; ION BOMBARDMENT; MICROHARDNESS; MICROSTRUCTURE; NANOSTRUCTURED MATERIALS; PLATING; RESIDUAL STRESSES; SPUTTERING; THERMAL EFFECTS; X RAY DIFFRACTION ANALYSIS;

BIAS VOLTAGE; HYBRID COATING SYSTEMS; TI-SI-N;

TITANIUM COMPOUNDS;

EID: 1342305084     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(03)01085-X     Document Type: Conference Paper

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