Texture development in Ti-Si-N nanocomposite thin films

Materials Science and Engineering: A

Volumn 423, Issue 1-2, 2006, Pages 111-115

  Chandra, R ^a   Kaur, Davinder ^a   Chawla, Amit Kumar ^a   Phinichka, N ^b   Barber, Z H ^c  

^a INDIAN INSTITUTE OF TECHNOLOGY ROORKEE   (India)

^b SRINAKHARINWIROT UNIVERSITY   (Thailand)

^c UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

Nanocomposite; Texture; Thin films; Ti Si N films

Indexed keywords

ATOMIC FORCE MICROSCOPY; CRYSTAL MICROSTRUCTURE; DEPOSITION; INDENTATION; MECHANICAL PROPERTIES; MORPHOLOGY; SPUTTERING; SURFACES; TEXTURES; THIN FILMS; TITANIUM COMPOUNDS; X RAY DIFFRACTION ANALYSIS;

GROWTH MORPHOLOGY; NANOINDENTATION; SAPPHIRE SUBSTRATES; TITANIUM SILICON NITRIDE;

NANOSTRUCTURED MATERIALS;

ATOMIC FORCE MICROSCOPY; CRYSTAL MICROSTRUCTURE; DEPOSITION; INDENTATION; MECHANICAL PROPERTIES; MORPHOLOGY; NANOSTRUCTURED MATERIALS; SPUTTERING; SURFACES; TEXTURES; THIN FILMS; TITANIUM COMPOUNDS; X RAY DIFFRACTION ANALYSIS;

EID: 33748176481     PISSN: 09215093     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.msea.2005.09.132     Document Type: Article

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