Molecular design of ultralow-k insulator materials

Materials Science- Poland

Volumn 25, Issue 4, 2007, Pages 1203-1211

  Zagorodniy, K ^a   Hermann, H ^a   Taut, M ^a  

^a IFW DRESDEN   (Germany)

Author keywords

Dielectric properties; Fullerene based dielectrics; Interlayer dielectrics; Mechanical properties; Microelectronics; Molecular design; Ultralow k dielectrics

Indexed keywords

COMPUTATIONAL GEOMETRY; COVALENT BONDS; DIELECTRIC MATERIALS; FULLERENES; MICROELECTRONICS; OPTICAL INTERCONNECTS; PERMITTIVITY; QUANTUM THEORY;

COVALENT LINKING; FULLERENE-BASED DIELECTRICS; INTERLAYER DIELECTRICS; MOLECULAR DESIGN; ULTRALOW-K DIELECTRICS;

ELECTRIC INSULATORS;

EID: 39049138450     PISSN: 01371339     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Conference Paper

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