Computer simulation of fullerene-based ultra-low k dielectrics

Microelectronic Engineering

Volumn 82, Issue 3-4 SPEC. ISS., 2005, Pages 387-392

  Hermann, H ^a   Zagorodniy, K ^a   Touzik, A ^a   Taut, M ^a   Seifert, G ^b  

^a IFW DRESDEN   (Germany)

^b DRESDEN UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Computer simulation; Fullerenes; Low k dielectrics; Molecular design

Indexed keywords

COMPUTER SIMULATION; DIELECTRIC MATERIALS; HYDROCARBONS; MOLECULES; PERMITTIVITY; QUANTUM THEORY;

LOW-K DIELETRICS; MOLECULAR DESIGN; NODES;

FULLERENES;

EID: 28044472490     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2005.07.021     Document Type: Conference Paper

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