-
1
-
-
33646425484
-
-
edited by S. P. Murarka, M. Eizenberg, and A. K. Sinha (Elsevier, New York
-
M. Uhlig and T. Gessner, in Chemical Vapor Deposition of C-F low-k materials, Interlayer Dielectrics, edited by, S. P. Murarka, M. Eizenberg, and, A. K. Sinha, (Elsevier, New York, 2003).
-
(2003)
Chemical Vapor Deposition of C-F Low-k Materials
-
-
Uhlig, M.1
Gessner, T.2
-
3
-
-
0000624992
-
-
JCPSA6 0021-9606 10.1063/1.481315
-
F. Kootstra, J. Chem. Phys. JCPSA6 0021-9606 10.1063/1.481315 112, 6517 (2000);
-
(2000)
J. Chem. Phys.
, vol.112
, pp. 6517
-
-
Kootstra, F.1
-
5
-
-
33646418095
-
-
University Groningen
-
F. Kootstra, Dissertation, University Groningen, 2001 (unpublished).
-
(2001)
-
-
Kootstra, F.1
-
6
-
-
0005601863
-
-
JCOMEL 0953-8984 10.1088/0953-8984/4/48/014
-
M. Taut, J. Phys.: Condens. Matter JCOMEL 0953-8984 10.1088/0953-8984/4/48/014 4, 9595 (1992).
-
(1992)
J. Phys.: Condens. Matter
, vol.4
, pp. 9595
-
-
Taut, M.1
-
7
-
-
0037037908
-
-
PRLTAO 0031-9007 10.1103/PhysRevLett.89.157602
-
P. Umari and A. Pasquarello, Phys. Rev. Lett. PRLTAO 0031-9007 10.1103/PhysRevLett.89.157602 89, 157602 (2002).
-
(2002)
Phys. Rev. Lett.
, vol.89
, pp. 157602
-
-
Umari, P.1
Pasquarello, A.2
-
8
-
-
0037048416
-
-
PRLTAO 0031-9007 10.1103/PhysRevLett.89.117602
-
I. Souza, J. Iniguez, and D. Vanderbilt, Phys. Rev. Lett. PRLTAO 0031-9007 10.1103/PhysRevLett.89.117602 89, 117602 (2002).
-
(2002)
Phys. Rev. Lett.
, vol.89
, pp. 117602
-
-
Souza, I.1
Iniguez, J.2
Vanderbilt, D.3
-
9
-
-
1842511795
-
-
PRBMDO 0163-1829 10.1103/PhysRevB.69.085117
-
Z.-R. Liu, J. Wu, and W. Duan, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.69.085117 69, 085117 (2004).
-
(2004)
Phys. Rev. B
, vol.69
, pp. 085117
-
-
Liu, Z.-R.1
Wu, J.2
Duan, W.3
-
13
-
-
84986483831
-
-
JCCHDD 0192-8651 10.1002/jcc.540160105
-
A. H. de Vries, J. Comput. Chem. JCCHDD 0192-8651 10.1002/jcc.540160105 16, 37 (1995).
-
(1995)
J. Comput. Chem.
, vol.16
, pp. 37
-
-
De Vries, A.H.1
-
14
-
-
0001303934
-
-
CMPHC2 0301-0104 10.1016/0301-0104(82)87020-1
-
B. T. Thole, Chem. Phys. CMPHC2 0301-0104 10.1016/0301-0104(82)87020-1 71, 211 (1982).
-
(1982)
Chem. Phys.
, vol.71
, pp. 211
-
-
Thole, B.T.1
-
15
-
-
0001760538
-
-
TCHAAM 0040-5744 10.1007/BF00549429
-
B. T. Thole, Theor. Chim. Acta TCHAAM 0040-5744 10.1007/BF00549429 55, 307 (1980).
-
(1980)
Theor. Chim. Acta
, vol.55
, pp. 307
-
-
Thole, B.T.1
-
16
-
-
84963975379
-
-
JCPSA6 0021-9606 10.1063/1.1512278
-
P. T. van Duijnen, J. Chem. Phys. JCPSA6 0021-9606 10.1063/1.1512278 117, 8442 (2002).
-
(2002)
J. Chem. Phys.
, vol.117
, pp. 8442
-
-
Van Duijnen, P.T.1
-
17
-
-
84961974339
-
-
JCPSA6 0021-9606 10.1063/1.478729
-
D. M. Chipman, J. Chem. Phys. JCPSA6 0021-9606 10.1063/1.478729 110, 8012 (1999).
-
(1999)
J. Chem. Phys.
, vol.110
, pp. 8012
-
-
Chipman, D.M.1
-
18
-
-
0345720252
-
-
JACSAT 0002-7863 10.1021/ja00179a044
-
K. Miller, J. Am. Chem. Soc. JACSAT 0002-7863 10.1021/ja00179a044 112, 8533 (1990);
-
(1990)
J. Am. Chem. Soc.
, vol.112
, pp. 8533
-
-
Miller, K.1
-
19
-
-
0001540723
-
-
JACSAT 0002-7863 10.1021/ja00179a045
-
K. Miller, J. Am. Chem. Soc. JACSAT 0002-7863 10.1021/ja00179a045 112, 8543 (1990).
-
(1990)
J. Am. Chem. Soc.
, vol.112
, pp. 8543
-
-
Miller, K.1
-
20
-
-
0032000501
-
-
JPCAFH 1089-5639 10.1021/jp972354r
-
J. M. Stout and C. E. Dykstra, J. Phys. Chem. A JPCAFH 1089-5639 10.1021/jp972354r 102, 1576 (1998);
-
(1998)
J. Phys. Chem. A
, vol.102
, pp. 1576
-
-
Stout, J.M.1
Dykstra, C.E.2
-
21
-
-
0001456891
-
-
JACSAT 0002-7863 10.1021/ja00123a015
-
J. M. Stout and C. E. Dykstra, J. Am. Chem. Soc. JACSAT 0002-7863 10.1021/ja00123a015 117, 5127 (1995).
-
(1995)
J. Am. Chem. Soc.
, vol.117
, pp. 5127
-
-
Stout, J.M.1
Dykstra, C.E.2
-
22
-
-
0001420703
-
-
JPCAFH 1089-5639 10.1021/jp981196g
-
K. O. Sylvester-Hvid, J. Phys. Chem. A JPCAFH 1089-5639 10.1021/ jp981196g 103, 1818 (1999);
-
(1999)
J. Phys. Chem. A
, vol.103
, pp. 1818
-
-
Sylvester-Hvid, K.O.1
-
23
-
-
0032000501
-
-
JPCAFH 1089-5639 10.1021/jp972354r
-
K. O. Sylvester-Hvid, J. Phys. Chem. A JPCAFH 1089-5639 10.1021/ jp972354r 102, 1576 (1998).
-
(1998)
J. Phys. Chem. A
, vol.102
, pp. 1576
-
-
Sylvester-Hvid, K.O.1
-
24
-
-
33947091822
-
-
JACSAT 0002-7863 10.1021/ja00764a010
-
J. Applequist, J. Am. Chem. Soc. JACSAT 0002-7863 10.1021/ja00764a010 94, 2952 (1972);
-
(1972)
J. Am. Chem. Soc.
, vol.94
, pp. 2952
-
-
Applequist, J.1
-
25
-
-
0000277792
-
-
JPCHAX 0022-3654 10.1021/j100124a039
-
J. Applequist, J. Phys. Chem. JPCHAX 0022-3654 10.1021/j100124a039 97, 6016 (1993);
-
(1993)
J. Phys. Chem.
, vol.97
, pp. 6016
-
-
Applequist, J.1
-
26
-
-
0037040790
-
-
JCPSA6 0021-9606 10.1063/1.1433747
-
L. Jensen, J. Chem. Phys. JCPSA6 0021-9606 10.1063/1.1433747 116, 4001 (2001);
-
(2001)
J. Chem. Phys.
, vol.116
, pp. 4001
-
-
Jensen, L.1
-
29
-
-
33645430111
-
-
PLRAAN 1050-2947 10.1103/PhysRevA.29.625
-
Z. H. Levine and P. Soven, Phys. Rev. A PLRAAN 1050-2947 10.1103/PhysRevA.29.625 29, 625 (1984).
-
(1984)
Phys. Rev. A
, vol.29
, pp. 625
-
-
Levine, Z.H.1
Soven, P.2
-
30
-
-
0002999458
-
-
PLRAAN 1050-2947 10.1103/PhysRevA.21.12
-
M. J. Stott and E. Zaremba, Phys. Rev. A PLRAAN 1050-2947 10.1103/PhysRevA.21.12 21, 12 (1980).
-
(1980)
Phys. Rev. A
, vol.21
, pp. 12
-
-
Stott, M.J.1
Zaremba, E.2
-
31
-
-
0001169488
-
-
PLRAAN 1050-2947 10.1103/PhysRevA.21.1561
-
A. Zangwill and P. Soven, Phys. Rev. A PLRAAN 1050-2947 10.1103/PhysRevA.21.1561 21, 1561 (1980).
-
(1980)
Phys. Rev. A
, vol.21
, pp. 1561
-
-
Zangwill, A.1
Soven, P.2
-
33
-
-
0032572120
-
-
JACSAT 0002-7863 10.1021/ja9730167
-
R. Bauerschmidt, J. Am. Chem. Soc. JACSAT 0002-7863 10.1021/ja9730167 120, 5052 (1998).
-
(1998)
J. Am. Chem. Soc.
, vol.120
, pp. 5052
-
-
Bauerschmidt, R.1
-
34
-
-
4243706463
-
-
PRBMDO 0163-1829 10.1103/PhysRevB.63.085108
-
T. A. Niehaus, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.63.085108 63, 085108 (2001).
-
(2001)
Phys. Rev. B
, vol.63
, pp. 085108
-
-
Niehaus, T.A.1
-
35
-
-
0035281322
-
-
JCPSA6 0021-9606 10.1063/1.1343899
-
K. Ruud, J. Chem. Phys. JCPSA6 0021-9606 10.1063/1.1343899 114, 4331 (2001).
-
(2001)
J. Chem. Phys.
, vol.114
, pp. 4331
-
-
Ruud, K.1
-
36
-
-
33749155905
-
-
CHPLBC 0009-2614 10.1016/0009-2614(93)89009-7
-
D. B. Whitehouse and A. D. Buckingham, Chem. Phys. Lett. CHPLBC 0009-2614 10.1016/0009-2614(93)89009-7 207, 332 (1993).
-
(1993)
Chem. Phys. Lett.
, vol.207
, pp. 332
-
-
Whitehouse, D.B.1
Buckingham, A.D.2
-
37
-
-
28044472490
-
-
MIENEF 0167-9317
-
H. Hermann, K. Zagorodniy, A. Touzik, M. Taut, and G. Seifert, Microelectron. Eng. MIENEF 0167-9317 82, 387 (2005).
-
(2005)
Microelectron. Eng.
, vol.82
, pp. 387
-
-
Hermann, H.1
Zagorodniy, K.2
Touzik, A.3
Taut, M.4
Seifert, G.5
-
38
-
-
0000697922
-
-
JCPSA6 0021-9606 10.1063/1.478944
-
R. Antoine, J. Chem. Phys. JCPSA6 0021-9606 10.1063/1.478944 110, 9771 (1999).
-
(1999)
J. Chem. Phys.
, vol.110
, pp. 9771
-
-
Antoine, R.1
-
41
-
-
0030281838
-
-
JPAPEH 0953-4075 10.1088/0953-4075/29/21/022
-
E. Westin, J. Phys. B JPAPEH 0953-4075 10.1088/0953-4075/29/21/022 29, 5087 (1996).
-
(1996)
J. Phys. B
, vol.29
, pp. 5087
-
-
Westin, E.1
-
42
-
-
0000968752
-
-
ANCEAD 0044-8249
-
O. V. Boltalina, V. Yu. Markov, P. A. Troshin, A. D. Darwish, J. M. Street, and R. Taylor, Angew. Chem. ANCEAD 0044-8249 113, 809 (2001).
-
(2001)
Angew. Chem.
, vol.113
, pp. 809
-
-
Boltalina, O.V.1
Markov, V.Yu.2
Troshin, P.A.3
Darwish, A.D.4
Street, J.M.5
Taylor, R.6
-
44
-
-
10344262885
-
-
CHPLBC 0009-2614
-
D. Paolucci, F. Paolucci, M. Marcaccio, M. Carano, and R. Taylor, Chem. Phys. Lett. CHPLBC 0009-2614 400, 389 (2004).
-
(2004)
Chem. Phys. Lett.
, vol.400
, pp. 389
-
-
Paolucci, D.1
Paolucci, F.2
Marcaccio, M.3
Carano, M.4
Taylor, R.5
-
45
-
-
0035907934
-
-
ANCEAD 0044-8249
-
S. I. Troyanov, P. A. Troshin, O. V. Boltalina, I. N. Ioffe, L. N. Sidorov, and E. Kemnitz, Angew. Chem. ANCEAD 0044-8249 113, 2285 (2001).
-
(2001)
Angew. Chem.
, vol.113
, pp. 2285
-
-
Troyanov, S.I.1
Troshin, P.A.2
Boltalina, O.V.3
Ioffe, I.N.4
Sidorov, L.N.5
Kemnitz, E.6
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