Density functional theory applied to the calculation of dielectric constant of low-k materials

Microelectronics Reliability

Volumn 39, Issue 2, 1999, Pages 279-284

  Courtot Descharles, A ^a   Pires, F ^b   Paillet, P ^a   Leray, J L ^a  

^a CEA DIF   (France)

^b CEA LETI   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; COMPUTER SIMULATION; PERMITTIVITY; SILICA;

CLAUSIUS-MOSSOTTI RELATIONSHIP; DENSITY FUNCTIONAL THEORY;

DIELECTRIC MATERIALS;

EID: 0032654387     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0026-2714(98)00237-6     Document Type: Article

References (17)

1. Bremmer JN, Liu Y, Gruszynsli KG, Dall FC. MRS'97 Spring Meeting, 1997.
2. Ree M., Chen K.J., Kirby D.P., Katzenellenbogen N., Grischkowsky D. J Appl Phys. 72:(5):1992;2014.
3. Pires F., Noël P., Le Cornec Ch, Passemard G., Louis D., Lajoinie E. Microelectron Engng. 37/38:1997;277.
4. Pires F, Passemard G, Noël P, Le Cornec C. Proceedings of Dielectrics for ULSI Multilevel Interconnection Conference, 1998. p. 133.
5. Többen D., Weigan P., Shapiro M.J., Cohen S.A. Mater Res Soc Symp Proc. 443:1997;195.
6. Ueda S, Ueda T, Mayumi S. Proceedings of Dielectrics for ULSI Multilevel Interconnection Conference, 1997. p. 160.
7. Pires F, Papapietro M, Passemard G, Noel P, Demolliens O. Proceedings of Dielectrics for ULSI Multilevel Interconnection Conference, 1997. p. 131.
8. Hill NE, Vaughan WE, Price AH, Davies M. Sugden TM, editor. Dielectric Properties and Molecular Behavior, 1st edn, 1969.
9. Liu Y, Bremmer J, Gruszynski K, Dall F. Proceedings of Dielectrics for ULSI Multilevel Interconnection Conference, 1997. p. 655.
10. Brüesch P., Stucki F., Baumann Th, Kluge-Weiss P., Brühl B., Niemeyer L., Strümpler R., Ziegler B., Mielke M. Appl Phys. A57:1993;329-337.
11. MSI. Dmol 4.0.0 Quantum Chemistry User Guide, 1996.
12. von Barth U., Hedin L. J Phys. C5:1972;1629.
13. Böttcher CJF. Theory of Electric Polarization, vol. 1. Amsterdam: Elsevier, 1973.
14. Handbook of Chemistry Physics, 69th edn, 1988-1989.
15. Kittel C. Introduction to Solid State Physics, 7th edn, New York: Wiley, 1996.
16. Gerschel A. Liaisons intermoléculaires. InterEditions, CNRS Editions, 1995.
17. Murase K. Jpn J Appl Phys. 33:1994;1385-1389.