Plasma parameters and active species kinetics in an inductively coupled HBr plasma

Journal of the Korean Physical Society

Volumn 52, Issue 1, 2008, Pages 48-55

  Efremov, Alexander ^a   Choi, Bok Gil ^b   Nahm, Sahn ^c   Lee, Hyun Woo ^d   Min, Nam Ki ^c   Kwon, Kwang Ho ^c  

^a IVANOVO STATE UNIVERSITY OF CHEMISTRY AND TECHNOLOGY   (Russian Federation)

^b Kongju National University   (South Korea)

^c Korea University   (South Korea)

^d Hanseo University   (South Korea)

Author keywords

Density; Dissociation; HBr plasma; Ionization; Rate coefficient

Indexed keywords

EID: 38949105242     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: 10.3938/jkps.52.48     Document Type: Article

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