Plasma parameters and chemical kinetics of an HCl DC glow discharge

Vacuum

Volumn 81, Issue 3, 2006, Pages 244-250

  Efremov, A M ^a   Kim, G H ^b   Balashov, D I ^a   Kim, C I ^b  

^a IVANOVO STATE UNIVERSITY OF CHEMISTRY AND TECHNOLOGY   (Russian Federation)

^b Chung Ang University   (South Korea)

Author keywords

Dissociation; HCL plasma; Modeling; Rate coefficient; Recombination

Indexed keywords

CHARGED PARTICLES; DISSOCIATION; ELECTRIC FIELDS; HYDROCHLORIC ACID; PLASMA DIAGNOSTICS; REACTION KINETICS; VIBRATION CONTROL;

RATE COEFFICIENT; RECOMBINATION KINETICS; SELF CONSISTENT SOLUTION; THE VIBRATIONAL ENERGY LEVELS;

GLOW DISCHARGES;

EID: 33749058074     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2006.03.025     Document Type: Article

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