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Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 40, Issue 12, 2001, Pages 7052-7060

Electron energy distributions in inductively coupled plasma of argon

(2) Yonemura, Shigeru a Nanbu, Kenichi a

Author keywords

Argon plasma; Coulomb collision; Electron energy distribution; Inductively coupled plasma; Particle in cell Monte Carlo method

Indexed keywords

ARGON; ATOMS; CARRIER CONCENTRATION; COMPUTER SIMULATION; ELECTRIC FIELD EFFECTS; ELECTRON ENERGY LEVELS; MAGNETIC FIELD EFFECTS; MONTE CARLO METHODS; PLASMA COLLISION PROCESSES; PLASMA DENSITY; PLASMA SIMULATION; PRESSURE EFFECTS;

COULOMB COLLISION; ELECTRON ENERGY DISTRIBUTION FUNCTION; ELECTRON TEMPERATURE; ELECTRON VELOCITY; ELECTRON-ATOM COLLISION; ELECTRON-ELECTRON COLLISION; INELASTIC COLLISION; PARTICLE-IN-CELL METHOD;

INDUCTIVELY COUPLED PLASMA;

EID: 0035710205 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/jjap.40.7052 Document Type: Article

Times cited : (19)

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