Resolution enhancement technology: The past, the present, and extensions for the future

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5374, Issue PART 1, 2004, Pages

  Schellenberg, Franklin M ^a  

^a MENTOR GRAPHICS CORPORATION   (United States)

Author keywords

Abbe; History of Optics; Polarization; Resolution; Resolution Enhancement; RET

Indexed keywords

ABBE; HISTORY OF OPTICS; RESOLUTION ENHANCEMENT TECHNIQUES (RET); RET; MODULATION TRANSFER FUNCTION (MTF);

BESSEL FUNCTIONS; COMPUTER AIDED DESIGN; DIFFRACTION GRATINGS; ELECTROMAGNETIC WAVE DIFFRACTION; OPTICAL TRANSFER FUNCTION; PHOTOLITHOGRAPHY; RAYLEIGH SCATTERING; ELECTROMAGNETIC WAVES; OPTICAL IMAGE STORAGE; OPTICAL WAVEGUIDES; PHASE CONTROL; POLARIZATION;

OPTICAL RESOLVING POWER;

EID: 3843137153     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.548923     Document Type: Conference Paper

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