Low-order ODE approximations and receding horizon control of surface roughness during thin-film growth

Chemical Engineering Science

Volumn 63, Issue 5, 2008, Pages 1246-1260

  Varshney, Amit ^a   Armaou, Antonios ^a  

^a The Pennsylvania State University   (United States)

Author keywords

Model reduction; Multiscale modeling; Receding horizon control; Surface roughness; System identification; Thin film growth

Indexed keywords

APPROXIMATION THEORY; DYNAMIC MODELS; IDENTIFICATION (CONTROL SYSTEMS); SURFACE ROUGHNESS;

MODEL-REDUCTION; MULTISCALE MODELING; RECEDING HORIZON CONTROL; THIN-FILM GROWTH;

THIN FILMS;

APPROXIMATION THEORY; DYNAMIC MODELS; IDENTIFICATION (CONTROL SYSTEMS); SURFACE ROUGHNESS; THIN FILMS;

EID: 38149065199     PISSN: 00092509     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ces.2007.07.058     Document Type: Article

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