Reduced order modeling and control of thin film growth in an HPCVD reactor

SIAM Journal on Applied Mathematics

Volumn 62, Issue 4, 2002, Pages 1251-1280

  Banks, H T ^a   Beeler, S C ^a   Kepler, G M ^a   Tran, H T ^a  

^a NORTH CAROLINA STATE UNIVERSITY   (United States)

Author keywords

Chemical vapor deposition; Nonlinear compensator; Nonlinear feedback tracking control; Reduced order model; State dependent Riccati equations

Indexed keywords

CHEMICAL VAPOR DEPOSITION; FEEDBACK CONTROL; FILM GROWTH; GAS DYNAMICS; ORDINARY DIFFERENTIAL EQUATIONS; PARTIAL DIFFERENTIAL EQUATIONS; RICCATI EQUATIONS; STATE ESTIMATION; THICKNESS CONTROL; THIN FILMS;

HIGH PRESSURE CHEMICAL VAPOR DEPOSITION; NONLINEAR COMPENSATOR; ORTHOGONAL DECOMPOSITION TECHNIQUE; REDUCED ORDER MODELING; STATE DEPENDENT RICCATI EQUATIONS; THIN FILM GROWTH;

MATHEMATICAL MODELS;

EID: 0036552529     PISSN: 00361399     EISSN: None     Source Type: Journal    
DOI: 10.1137/S0036139901383280     Document Type: Article

References (44)

1. Towards closed-loop control of CVD coating microstructures
2. Virtual control simulator for closed-loop epitaxial growth
3. Feedback control of MOCVD growth of submicron compound semiconductor films
4. xP film growth by p-polarized reflectance
5. Proper orthogonal decomposition for flow calculations and optimal control in a horizontal CVD reactor
6. Reduced order model compensator control of species transport in a CVD reactor
7. Compensator control for chemical vapor deposition film growth using reduced order design models
8. Three-dimensional modelling of horizontal chemical vapor deposition I. MOCVD at atmospheric pressure
9. Two-and three-dimensional finite element simulations of reacting flows in chemical vapor deposition of compound semiconductors
10. Representation of GaP formation by a reduced order surface kinetics model using p-polarized reflectance measurements
11. State estimation and tracking control of nonlinear dynamical systems
12. Calculation of unimolecular rate constants for common metalorganic vapor-phase epitaxy precursors via RRKM theory
13. Decomposition mechanisms of trimethylgallium
14. The finite element method with penalty
15. Finite element approximation of the Dirichlet problem using the boundary penalty method
16. Zur Spektraltheorie Stochasticher Prozesse
17. Functions Aleatoire de Second Ordre
18. Observations on the proper orthogonal decomposition
19. Low-dimensional models of coherent structures in turbulence
20. Stability properties of POD-Galerkin approximations for the compressible Navier-Stokes equations
21. Model reduction for optimization of rapid thermal chemical vapor deposition systems
22. Approximation methods in optimal control
23. A technique for suboptimal control of nonlinear systems
24. Suboptimal control for the nonlinear quadratic regulator problem
25. Optimal feedback control of non-linear systems
26. ∞ control via the state-dependent riccati equation technique: Part 1. Theory
27. Reduced order model feedback control design: Computational studies for thin cylindrical shells
28. Reduced order model feedback control design: Numerical implementation in a thin shell model
29. Galerkin proper orthogonal decomposition methods for parabolic problems