Estimation and control of surface roughness in thin film growth using kinetic Monte-Carlo models

Chemical Engineering Science

Volumn 58, Issue 14, 2003, Pages 3115-3129

  Lou, Yiming ^a   Christofides, Panagiotis D ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Feedback control; Model based estimation; Multiscale modeling; Thin film growth

Indexed keywords

ADSORPTION; MATHEMATICAL MODELS; MICROSTRUCTURE; SURFACE ROUGHNESS; THIN FILMS;

SURFACE MIGRATION;

FILM GROWTH;

SURFACE ROUGHNESS;

EID: 0037962061     PISSN: 00092509     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0009-2509(03)00166-0     Document Type: Article

References (29)

1. Akiyama Y. Imaishi N. Shin Y.S. Jung S.C. Macro- and micro-scale simulation of growth rate and composition in MOCVD of yttria-stabilized ziroconia Journal of Crystal Growth 241 2002 352-362
2. Armaou A. Christofides P.D. Plasma-enhanced chemical vapor deposition: Modeling and control Chemical Engineering Science 54 1999 3305-3314
3. Armaou, A., Siettos, C. I., - Kevrekidis, I. G. (2002). Time-steppers and control of microscopic distributed processes. A.I.Ch.E. Annual Meeting, Paper 257a, Indianapolis, IN, 2002.
4. Baker J. Christofides P.D. Output feedback control of parabolic PDE systems with nonlinear spatial differential operators Industrial and Engineering Chemistry Research 38 1999 4372-4380
5. Chabal Y.J. Muller D.A. Opila R.L. Kwo J.R. Busch B.W. Pluchery O. Garfunkel E. MRS Bulletin 3 2002 206-211
6. Chang J.P. Lin Y.S. Berger S. Kepten A. Bloom R. Levy S. Ultrathin zirconium oxide films as alternative gate dielectrics Journal of Vacuum Science Technology B 19 2001 2137-2143
7. Chen S. Merriman B. Kang M. Caflisch R.E. Ratsch C. Cheng L.T. Gyure M. Fedkiw R.P. Osher S. A level set method for thin film epitaxial growth Journal of Computational Physics 167 2001 1-26
8. Christofides P.D. Nonlinear and robust control of PDE systems: Methods and applications to transport-reaction processes 2001 Birkhäuser Boston
9. Fichthorn K.A. Weinberg W.H. Theoretical foundations of dynamical Monte Carlo simulations Journal of Chemical Physics 95 1991 1090-1096
10. Gadgil P.N. Single wafer processing in stagnation point flow CVD reactor: Prospects, constraints and reactor design Journal of Electronic Materials 22 1993 171-177
11. Gallivan, M. A., Goodwin, D. G., - Murray, R. M. (2001). Modeling and control of thin film morphology using unsteady processing parameters: Problem formulation and initial results. In Proceedings of 40th IEEE conference on decision and control, Orlando, FL, USA (pp. 1570-1576).
12. Gallivan, M. A., - Murray, R. M. (2003). Model reduction and system identification of master equation control systems. In Proceedings of American control conference, Denver, CO.
13. Gilmer G.H. Bennema P. Simulation of crystal growth with surface diffusion Journal of Applied Physics 43 1972 1347-1360
14. Granneman E.H. Thin films in the integrated circuit industry: Requirements and deposition methods Thin Solid Films 228 1993 1-11
15. Jansen A.P.J. Monte Carlo simulations of chemical reactions on a surface with time-dependent reaction-rate constants Computer Physics Communications 86 1995 1-12
16. Kang H.C. Weinberg W.H. Dynamic Monte Carlo simulations of surface-rate processes Accounts of Chemical Research 25 1992 253-259
17. Lam R. Vlachos D.G. Multiscale model for epitaxial growth of films: Growth mode transition Physical Review B 6403 2001 396-404
18. 5 interface and its effects on electrical performance of alternating current thin-film electroluminescent devices IEEE Transactions on Electronics Devices 46 1999 892-896
19. Lou, Y., - Christofides, P. D. (2003). Feedback control of growth rate and surface roughness in thin film growth. A.I.Ch.E. Journal, in press.
20. Ni, D., Lou, Y., Christofides, P. D., Lao, S., - Chang, J. P. (2003). Real-time feedback control of carbon content of zirconium dioxide thin films using optical emission spectroscopy. In Proceedings of the international symposium on advanced control of chemical processes, Hong Kong, China.
21. Raimondeau S. Vlachos D.G. Low-dimensional approximations of multiscale epitaxial growth models for microstructure control of materials Journal of Computational Physics 160 2000 564-576
22. Reese J.S. Raimondeau S. Vlachos D.G. Monte Carlo algorithms for complex surface reaction mechanisms: Efficiency and accuracy Journal of Computational Physics 173 2001 302-321
23. Theodoropoulou A. Adomaitis R.A. Zafiriou E. Inverse model based real-time control for temperature uniformity of RTCVD IEEE Transactions on Semiconductors Manufacturing 12 1999 87-101
24. Van Kampen N.G. Stochastic processes in physics and chemistry 1992 North-Holland Amsterdam
25. Vlachos D.G. Multiscale integration hybrid algorithms for homogeneous-heterogeneous reactors A.I.Ch.E. Journal 43 1997 3031-3041
26. Voigtländer B. Fundamental processes in Si/Si and Ge/Si studied by scanning tunneling microscopy during growth Surface Science Reports 43 2001 127-254
27. Wallace R.M. Wilk G.D. MRS Bulletin 3 2002 192-197
28. Zapien J.A. Messier R. Collin R.W. Ultraviolet-extended real-time spectroscopic ellipsometry for characterization of phase evolution in BN thin films Applied Physics Letters 78 2001 1982-1984
29. Ziff R.M. Gulari E. Barshad Y. Kinetic phase transitions in an irreversible surface-reaction model Physics Review Letters 56 1986 2553-2556