Multiscale optimization using hybrid PDE/kMC process systems with application to thin film growth

Chemical Engineering Science

Volumn 60, Issue 23, 2005, Pages 6780-6794

  Varshney, Amit ^a   Armaou, Antonios ^a  

^a The Pennsylvania State University   (United States)

Author keywords

Distributed systems; In situ adaptive tabulation; Karhuenen Lo ve expansion; Multiscale systems; Optimization; Thin film growth

Indexed keywords

CONTINUUM MECHANICS; DIFFERENTIAL EQUATIONS; INTAKE SYSTEMS; MATHEMATICAL MODELS; MICROSCOPIC EXAMINATION; OPTIMIZATION; PROBLEM SOLVING; SURFACE ROUGHNESS; THIN FILMS;

IN SITU ADAPTIVE TABULATION; KARHUENEN-LOÉVE EXPANSION; MULTISCALE SYSTEMS; THIN-FILM GROWTH;

FILM GROWTH;

CHEMICAL ENGINEERING; OPTIMIZATION;

EID: 27144471786     PISSN: 00092509     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ces.2005.05.055     Document Type: Article

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