Modeling and Control of Distributed Thermal Systems

IEEE Transactions on Control Systems Technology

Volumn 11, Issue 5, 2003, Pages 668-683

  Emami Naeini, Abbas ^a   Ebert, Jon L ^a   De Roover, Dick ^a   Kosut, Robert L ^a   Dettori, Marco ^a   Porter, La Moyne L ^a   Ghosal, Sarbajit ^a  

^a SC Solutions Inc   (United States)

Author keywords

Distributed thermal systems; Linear quadratic Gaussian (LQG); Model based control; Physical model; Principal orthogonal decomposition (POD); Rapid thermal processing (RTP); Real time control implementation

Indexed keywords

CONTROL EQUIPMENT; MATHEMATICAL MODELS; SEMICONDUCTOR MATERIALS; TEMPERATURE CONTROL;

DISTRIBUTED THERMAL SYSTEMS;

DISTRIBUTED PARAMETER CONTROL SYSTEMS;

EID: 0141732262     PISSN: 10636536     EISSN: None     Source Type: Journal    
DOI: 10.1109/TCST.2003.816411     Document Type: Article

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