Effects of ion implantation on the mechanical behavior of GaN films

Thin Solid Films

Volumn 515, Issue 5, 2007, Pages 3011-3018

  Kavouras, P ^a   Komninou, Ph ^a   Karakostas, Th ^a  

^a ARISTOTLE UNIVERSITY OF THESSALONIKI   (Greece)

Author keywords

Elastic properties; Fracture sequence; Hardness; Ion implantation; Nitrides; Semiconductors

Indexed keywords

GALLIUM NITRIDE; INDENTATION; NITRIDES; POLYCRYSTALLINE MATERIALS; THIN FILMS; VICKERS HARDNESS TESTING;

FRACTURE SEQUENCE; INDENTATION SIZE EFFECT (ISE); MICROINDENTATION; POLYCRYSTALLINE EPILAYERS;

ION IMPLANTATION;

EID: 33845917832     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2006.08.032     Document Type: Article

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