Novel patterning of composite thick film PZT

Journal of Electroceramics

Volumn 19, Issue 4, 2007, Pages 315-319

  Tyholdt, F ^a   Dorey, R A ^b   Raeder H ^a  

^a SINTEF   (Norway)

^b CRANFIELD UNIVERSITY   (United Kingdom)

Author keywords

Composite thick film; Micro mould; Pattern; PZT

Indexed keywords

ACTUATORS; MEMS; THICK FILMS; WET ETCHING;

COMPOSITE THICK FILMS; FREQUENCY TRANSDUCERS; MICRO MOULD; PATTERNS;

PIEZOELECTRIC DEVICES;

EID: 37249048898     PISSN: 13853449     EISSN: 15738663     Source Type: Journal    
DOI: 10.1007/s10832-007-9318-9     Document Type: Article

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