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Volumn 8, Issue 1, 1997, Pages 1-20

Thick-film sensors: Past, present and future

Author keywords

[No Author keywords available]

Indexed keywords

HYBRID INTEGRATED CIRCUITS; MICROELECTRONICS; SILICON SENSORS; THICK FILM DEVICES;

EID: 0030782590     PISSN: 09570233     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-0233/8/1/002     Document Type: Review
Times cited : (227)

References (98)
  • 4
    • 85034732225 scopus 로고
    • Sensor interfacing: A hybrid solution case study of a collaboration between USITT and British Technology Group
    • Southampton: University of Southampton
    • Dargie P D 1992 Sensor interfacing: a hybrid solution case study of a collaboration between USITT and British Technology Group Short Course Notes, Thick-film Technology: Theory and Applications (Southampton) (Southampton: University of Southampton)
    • (1992) Short Course Notes, Thick-film Technology: Theory and Applications (Southampton)
    • Dargie, P.D.1
  • 6
    • 3643094084 scopus 로고
    • Free supporting structures in thick-film technology: A substrate integrated pressure sensor
    • Stecher G 1987 Free supporting structures in thick-film technology: a substrate integrated pressure sensor Proc. 8th European Microelectronics Conf. pp 421-7
    • (1987) Proc. 8th European Microelectronics Conf. , pp. 421-427
    • Stecher, G.1
  • 7
    • 0028380821 scopus 로고
    • Analysis of thick-film strain resistors on stainless steel and ceramic substrates
    • Arshak K I, Ansari F and Collins D 1994 Analysis of thick-film strain resistors on stainless steel and ceramic substrates Int. J. Electron. 76 365-76
    • (1994) Int. J. Electron. , vol.76 , pp. 365-376
    • Arshak, K.I.1    Ansari, F.2    Collins, D.3
  • 11
    • 0022488237 scopus 로고
    • Thick-film pressure transducers
    • Di Flore and Haskard M 1986 Thick-film pressure transducers Microelectron. J. 17 35-41
    • (1986) Microelectron. J. , vol.17 , pp. 35-41
    • Di Flore1    Haskard, M.2
  • 12
    • 0000337429 scopus 로고
    • A thick-film pressure transducer for cars propelled by natural gas
    • Fraigi, L, Lupi D and Malatto L 1994 A thick-film pressure transducer for cars propelled by natural gas Sensors Actuators A 41+42 439-41
    • (1994) Sensors Actuators A , vol.41-42 , pp. 439-441
    • Fraigi, L.1    Lupi, D.2    Malatto, L.3
  • 15
    • 0024737477 scopus 로고
    • Very high strain sensitivity in thick-film resistors: Real and false super gauge factors
    • Prudenziati M, Morten B, Cilloni F and Ruffi G 1989 Very high strain sensitivity in thick-film resistors: real and false super gauge factors Sensors Actuators 19 401-14
    • (1989) Sensors Actuators , vol.19 , pp. 401-414
    • Prudenziati, M.1    Morten, B.2    Cilloni, F.3    Ruffi, G.4
  • 16
    • 0023383852 scopus 로고
    • Assessment of thick-film fabrication methods for force (pressure) sensors
    • Puers B, Sansen W and Paszczynski 1987 Assessment of thick-film fabrication methods for force (pressure) sensors Sensors Actuators 12 57-76
    • (1987) Sensors Actuators , vol.12 , pp. 57-76
    • Puers, B.1    Sansen, W.2    Paszczynski3
  • 18
    • 0027615037 scopus 로고
    • A novel accelerometer using thick-film technology
    • Sion R P, Atkinson J K and Turner J D 1993 A novel accelerometer using thick-film technology Sensors Actuators 37+38 348-51
    • (1993) Sensors Actuators , vol.37-38 , pp. 348-351
    • Sion, R.P.1    Atkinson, J.K.2    Turner, J.D.3
  • 19
    • 0002194054 scopus 로고
    • Design and fabrication of thick-film sensors
    • White N and Cranny A 1987 Design and fabrication of thick-film sensors Hybrid Circuits 12 32-5
    • (1987) Hybrid Circuits , vol.12 , pp. 32-35
    • White, N.1    Cranny, A.2
  • 24
    • 0026854126 scopus 로고
    • The state of the art in thick-film sensors
    • Prudenziati, M and Morten B 1992 The state of the art in thick-film sensors Microelectron. J. 23 133-41
    • (1992) Microelectron. J. , vol.23 , pp. 133-141
    • Prudenziati, M.1    Morten, B.2
  • 25
    • 0004853721 scopus 로고
    • Two thick-film thermal sensors
    • Kwikkers T 1988 Two thick-film thermal sensors Hybrid Circuits 16 39-42
    • (1988) Hybrid Circuits , vol.16 , pp. 39-42
    • Kwikkers, T.1
  • 26
    • 0025496008 scopus 로고
    • A laser power detector built up by application of thick-film technology
    • Nicolics J and Smetana W 1991 A laser power detector built up by application of thick-film technology Sensors Actuators A 25-27 235-9
    • (1991) Sensors Actuators A , vol.25-27 , pp. 235-239
    • Nicolics, J.1    Smetana, W.2
  • 27
    • 85034775412 scopus 로고
    • Thick-film laser power detector
    • Pércsi L and Harsányi 1994 Thick-film laser power detector Hybrid Circuits 35 25-7
    • (1994) Hybrid Circuits , vol.35 , pp. 25-27
    • Pércsi, L.1    Harsányi2
  • 28
    • 18344416681 scopus 로고
    • Application of integrated thick-film thermocouples for a laser power detector
    • Smetana W and Nicolics J 1993 Application of integrated thick-film thermocouples for a laser power detector Sensors Actuators A 37+38 565-70
    • (1993) Sensors Actuators A , vol.37-38 , pp. 565-570
    • Smetana, W.1    Nicolics, J.2
  • 29
    • 3643088946 scopus 로고
    • Processing and diagnostic for thick-film superconductors produced from Y-Ba-Cu-O materials
    • Choi J S, Bhalodia M, Samph S, Snowden P, Yahner P and Scoles K J 1989 Processing and diagnostic for thick-film superconductors produced from Y-Ba-Cu-O materials Hybrid Circuits 19 17, 18, 22
    • (1989) Hybrid Circuits , vol.19 , pp. 17
    • Choi, J.S.1    Bhalodia, M.2    Samph, S.3    Snowden, P.4    Yahner, P.5    Scoles, K.J.6
  • 30
    • 3643070112 scopus 로고
    • Thick-film superconductors - Preliminary results
    • Hrovat M, Bernik S and Kolar D 1988 Thick-film superconductors - preliminary results Hybrid Circuits 16 4-6
    • (1988) Hybrid Circuits , vol.16 , pp. 4-6
    • Hrovat, M.1    Bernik, S.2    Kolar, D.3
  • 33
    • 0001126249 scopus 로고
    • Dielectric, ferroelectric, and piezoelectric properties of lead zirconate titanate thick-films on silicon substrates
    • Chen H D, Udayakumar K R, Cross L E, Bernstein J J and Niles L C 1995 Dielectric, ferroelectric, and piezoelectric properties of lead zirconate titanate thick-films on silicon substrates J. Appl. Phys. 77 3349-53
    • (1995) J. Appl. Phys. , vol.77 , pp. 3349-3353
    • Chen, H.D.1    Udayakumar, K.R.2    Cross, L.E.3    Bernstein, J.J.4    Niles, L.C.5
  • 34
    • 0027614781 scopus 로고
    • Fabrication of piezoelectric thick-film low voltage multilayer actuators using a new double paste printing technique
    • Moilanen H, Leppävuori S and Uusimäki A 1993 Fabrication of piezoelectric thick-film low voltage multilayer actuators using a new double paste printing technique Sensors Actuators A 37+38 106-11
    • (1993) Sensors Actuators A , vol.37-38 , pp. 106-111
    • Moilanen, H.1    Leppävuori, S.2    Uusimäki, A.3
  • 35
    • 3643124319 scopus 로고
    • Piezoelectric micromovement actuator and force sensor hybridization using a thick-film double-paste printing method
    • Moilanen H, Lappalainen J, Laitinen L and Leppävuori S 1994 Piezoelectric micromovement actuator and force sensor hybridization using a thick-film double-paste printing method Sensors Actuators 41+42 421-5
    • (1994) Sensors Actuators , vol.41-42 , pp. 421-425
    • Moilanen, H.1    Lappalainen, J.2    Laitinen, L.3    Leppävuori, S.4
  • 41
    • 0001547953 scopus 로고
    • Changes in thick-film resistor values due to substrate flexure
    • Holmes P J 1973 Changes in thick-film resistor values due to substrate flexure Microelectron. Reliab. 12 395-6
    • (1973) Microelectron. Reliab. , vol.12 , pp. 395-396
    • Holmes, P.J.1
  • 42
    • 0016992347 scopus 로고
    • Electrical conduction by percolation in thick-film resistors
    • Forlani F and Prudenziati M 1976 Electrical conduction by percolation in thick-film resistors Electrocomput. Sci. Technol. 3 77-83
    • (1976) Electrocomput. Sci. Technol. , vol.3 , pp. 77-83
    • Forlani, F.1    Prudenziati, M.2
  • 43
    • 0017677423 scopus 로고
    • Electrical properties and conduction mechanisms of Ru-based thick-film resistors
    • Pike G E and Seager C H 1977 Electrical properties and conduction mechanisms of Ru-based thick-film resistors J. Appl. Phys. 48 5152-69
    • (1977) J. Appl. Phys. , vol.48 , pp. 5152-5169
    • Pike, G.E.1    Seager, C.H.2
  • 44
    • 51249182392 scopus 로고
    • Tunneling in thick-film resistors and the minimum of resistance
    • Prudenziati M, Rizzi A, Davioli P and Mattei A 1983 Tunneling in thick-film resistors and the minimum of resistance Nuovo Cimento 3 697-710
    • (1983) Nuovo Cimento , vol.3 , pp. 697-710
    • Prudenziati, M.1    Rizzi, A.2    Davioli, P.3    Mattei, A.4
  • 45
  • 47
    • 0002090612 scopus 로고
    • Piezoresistive properties of thick-film resistors: An overview
    • Prudenziati M and Morten B 1986 Piezoresistive properties of thick-film resistors: an overview Hybrid Circuits 10 20-5
    • (1986) Hybrid Circuits , vol.10 , pp. 20-25
    • Prudenziati, M.1    Morten, B.2
  • 50
    • 0026119057 scopus 로고
    • A phenomenological method of predicting the performance of piezoelectric beams
    • Söderkvist J 1991 A phenomenological method of predicting the performance of piezoelectric beams J. Micromech. Microeng. 1 16-24
    • (1991) J. Micromech. Microeng. , vol.1 , pp. 16-24
    • Söderkvist, J.1
  • 51
  • 54
    • 0026840111 scopus 로고
    • Resonant pressure sensors based on piezoelectric properties of ferroelectric thick-films
    • Morten B, De Cicco G and Prudenziati M 1992 Resonant pressure sensors based on piezoelectric properties of ferroelectric thick-films Sensors Actuators A 31 153-8
    • (1992) Sensors Actuators A , vol.31 , pp. 153-158
    • Morten, B.1    De Cicco, G.2    Prudenziati, M.3
  • 55
    • 0027611924 scopus 로고
    • A thick-film resonant sensor for humidity measurements
    • Morten B, De Cicco G and Prudenziati M 1993 A thick-film resonant sensor for humidity measurements Sensors Actuators A 37+38 337-42
    • (1993) Sensors Actuators A , vol.37-38 , pp. 337-342
    • Morten, B.1    De Cicco, G.2    Prudenziati, M.3
  • 56
    • 0028407413 scopus 로고
    • A novel torque sensor based on elastic waves generated and detected by piezoelectric thick-film
    • Morten B, De Cicco G and Prudenziati M 1994 A novel torque sensor based on elastic waves generated and detected by piezoelectric thick-film Sensors Actuators 41+42 33-8
    • (1994) Sensors Actuators , vol.41-42 , pp. 33-38
    • Morten, B.1    De Cicco, G.2    Prudenziati, M.3
  • 57
    • 3643117089 scopus 로고
    • Fabrication of a thick-film sensor employing an ultrasonic oscillator
    • White N M and Leach G R 1995 Fabrication of a thick-film sensor employing an ultrasonic oscillator IEE Proc. Sci. Meas. Technol. 42 249-54
    • (1995) IEE Proc. Sci. Meas. Technol. , vol.42 , pp. 249-254
    • White, N.M.1    Leach, G.R.2
  • 58
    • 0027655306 scopus 로고
    • Thick-film acoustic wave sensor structure
    • White N M and Ko V T K 1993 Thick-film acoustic wave sensor structure Electron. Lett. 29 1807-8
    • (1993) Electron. Lett. , vol.29 , pp. 1807-1808
    • White, N.M.1    Ko, V.T.K.2
  • 61
    • 0014926080 scopus 로고
    • Surface elastic waves
    • White RM 1988 Surface elastic waves Proc. IEEE 58 1238-75
    • (1988) Proc. IEEE , vol.58 , pp. 1238-1275
    • White, R.M.1
  • 63
    • 0028523497 scopus 로고
    • A thick-film capacitive pressure transducer
    • Dargie P G and Hughes S T 1994 A thick-film capacitive pressure transducer Meas. Sci. Technol. 5 1216-20
    • (1994) Meas. Sci. Technol. , vol.5 , pp. 1216-1220
    • Dargie, P.G.1    Hughes, S.T.2
  • 64
    • 3643118062 scopus 로고
    • Large area high-current photoconductive cell using cadmium sulphide powder
    • Nicoll F H and Kazan B 1955 Large area high-current photoconductive cell using cadmium sulphide powder J. Opt. Soc. Am. 45 647-50
    • (1955) J. Opt. Soc. Am. , vol.45 , pp. 647-650
    • Nicoll, F.H.1    Kazan, B.2
  • 66
    • 3643089961 scopus 로고
    • Thick-film photosensors
    • Ross J N 1995 Thick-film photosensors Meas. Sci. Technol. 6 405-9
    • (1995) Meas. Sci. Technol. , vol.6 , pp. 405-409
    • Ross, J.N.1
  • 67
    • 0342981949 scopus 로고
    • CdS based photoconducting sensors
    • ed M Prudenziati (Amsterdam: Elsevier)
    • Setty M S and Amainerkar D P 1994 CdS based photoconducting sensors Thick-Film Sensors ed M Prudenziati (Amsterdam: Elsevier)
    • (1994) Thick-Film Sensors
    • Setty, M.S.1    Amainerkar, D.P.2
  • 68
    • 3643097192 scopus 로고
    • Screen printed CdS/CdTe solar cells
    • ed M Prudenziati (Amsterdam: Elsevier)
    • Ikegami S and Uda H 1994 Screen printed CdS/CdTe solar cells Thick-Film Sensors ed M Prudenziati (Amsterdam: Elsevier)
    • (1994) Thick-Film Sensors
    • Ikegami, S.1    Uda, H.2
  • 70
    • 0015600445 scopus 로고
    • Photovoltaic junctions formed on silk-screened cadmium sulphide layers
    • Vojdani S, Sharifanai A and Doroudian M 1973 Photovoltaic junctions formed on silk-screened cadmium sulphide layers Electron. Lett. 9 647-50
    • (1973) Electron. Lett. , vol.9 , pp. 647-650
    • Vojdani, S.1    Sharifanai, A.2    Doroudian, M.3
  • 72
    • 36149027411 scopus 로고
    • Impurity conduction at low temperatures
    • Miller A and Abrahams E 1960 Impurity conduction at low temperatures Phys. Rev. 120 745-8
    • (1960) Phys. Rev. , vol.120 , pp. 745-748
    • Miller, A.1    Abrahams, E.2
  • 74
    • 0028427369 scopus 로고
    • Thick-film heater elements and temperature sensors in modern domestic appliances
    • Tait R B, Humphries R and Lorenz J 1994 Thick-film heater elements and temperature sensors in modern domestic appliances IEEE Trans. Indust. Appl. 30 573-7
    • (1994) IEEE Trans. Indust. Appl. , vol.30 , pp. 573-577
    • Tait, R.B.1    Humphries, R.2    Lorenz, J.3
  • 75
    • 0000019238 scopus 로고
    • A novel model for the temperature characteristic of a thick-film piezoresistive sensor
    • Sion R P, Atkinson J K and Turner J D 1994 A novel model for the temperature characteristic of a thick-film piezoresistive sensor Sensors Actuators 41+42 460-4
    • (1994) Sensors Actuators , vol.41-42 , pp. 460-464
    • Sion, R.P.1    Atkinson, J.K.2    Turner, J.D.3
  • 81
    • 0022732681 scopus 로고
    • A study of the temperature dependence of the barrier energy in porous tin oxide
    • Lantto V, Romppainen P and Leppävuori S 1988 A study of the temperature dependence of the barrier energy in porous tin oxide Sensors Actuators 14 149-63
    • (1988) Sensors Actuators , vol.14 , pp. 149-163
    • Lantto, V.1    Romppainen, P.2    Leppävuori, S.3
  • 85
    • 0029288577 scopus 로고
    • Thick-film zinc-oxide gas sensor for the control of lean air-to-fuel ratio in domestic combustion systems
    • Kwon C H, Hong H, Yun D H, Lee K, Kim S, Roh Y and Lee B 1995 Thick-film zinc-oxide gas sensor for the control of lean air-to-fuel ratio in domestic combustion systems Sensors Actuators B 24+25 610-3
    • (1995) Sensors Actuators B , vol.24-25 , pp. 610-613
    • Kwon, C.H.1    Hong, H.2    Yun, D.H.3    Lee, K.4    Kim, S.5    Roh, Y.6    Lee, B.7
  • 87
    • 0023345530 scopus 로고
    • Using integrated capacitive humidity sensors in thick-film technology
    • Smetana W and Wiedermann W 1987 Using integrated capacitive humidity sensors in thick-film technology Sensors Actuators 11 329-37
    • (1987) Sensors Actuators , vol.11 , pp. 329-337
    • Smetana, W.1    Wiedermann, W.2
  • 88
    • 0028410272 scopus 로고
    • A thick film sensor for atmospheric corrosion testing
    • Fraigi L, Gwirc S N and Lupi D 1994 A thick film sensor for atmospheric corrosion testing Sensors Actuators B 18+19 558-61
    • (1994) Sensors Actuators B , vol.18-19 , pp. 558-561
    • Fraigi, L.1    Gwirc, S.N.2    Lupi, D.3
  • 89
    • 0023401990 scopus 로고
    • Solid-state electrochemical gas sensors
    • Weppner W 1987 Solid-state electrochemical gas sensors Sensors Actuators 12 107-19
    • (1987) Sensors Actuators , vol.12 , pp. 107-119
    • Weppner, W.1
  • 92
    • 0029344829 scopus 로고
    • Novel thick-film pH sensors based on ruthenium dioxide-glass composites
    • McMurray H N, Douglas P and Abbott D 1995 Novel thick-film pH sensors based on ruthenium dioxide-glass composites Sensors Actuators B 28 9-15
    • (1995) Sensors Actuators B , vol.28 , pp. 9-15
    • McMurray, H.N.1    Douglas, P.2    Abbott, D.3
  • 93
    • 0029736603 scopus 로고    scopus 로고
    • Thick-film multichannel biosensors for simultaneous amperometric and potentiometric measurements
    • Silber A, Bisenberger M, Brauchle C and Hampp N 1996 Thick-film multichannel biosensors for simultaneous amperometric and potentiometric measurements Sensors Actuators B 30 127-32
    • (1996) Sensors Actuators B , vol.30 , pp. 127-132
    • Silber, A.1    Bisenberger, M.2    Brauchle, C.3    Hampp, N.4
  • 98
    • 85034760943 scopus 로고    scopus 로고
    • Superconducting thick-film magnetic field sensors (thick-film sensors)
    • 19XX ed M Prudenziati (Amsterdam: Elsevier)
    • Gupta A, Khare N and Tomar V 19XX Superconducting thick-film magnetic field sensors (thick-film sensors) Handbook of Sensors and Actuators ed M Prudenziati (Amsterdam: Elsevier) p 401
    • Handbook of Sensors and Actuators , pp. 401
    • Gupta, A.1    Khare, N.2    Tomar, V.3


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