Microstructure and properties of PZT53/47 thick films derived from sols with submicron-sized PZT particle

Ceramics International

Volumn 30, Issue 7, 2004, Pages 1925-1927

  Zhao, Changlei ^a   Wang, Zhihong ^a   Zhu, Weiguang ^a   Tan, Ooikiang ^a   Hng, Hueyhoon ^b  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

A. Film; D. PZT; Sol gel

Indexed keywords

ANNEALING; FERROELECTRICITY; MICROSTRUCTURE; PIEZOELECTRIC DEVICES; SOL-GELS; SPIN COATING; THICK FILMS;

ELASTIC MEMBRANES; PIEZOELECTRIC DIAPHRAGMS; PIEZOELECTRIC FILMS;

LEAD COMPOUNDS;

EID: 4344575025     PISSN: 02728842     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ceramint.2003.12.040     Document Type: Conference Paper

References (6)

1. Polla D.L., Robbins W.P., Tamagawa T., Ye C. Ferroelectric thin films for microelectromechanical device application. Mater. Res. Soc. Symp. Proc. 276:1992;3-23.
2. Barrow D.A., Petroff T.E., Tandon R.P., Sayer M. Characterization of thick lead zirconate titanate films fabricated using a new sol-gel based process. J. Appl. Phys. 81(2):1997;876-881.
3. Sayer M., Lockwood G.R., Olding T.R., Pang G., Cohen L.M., Ren W., Mukherjee B.K. Mater. Res. Soc. Proc. 655:2001;cc13.6.
4. C.L. Zhao, Z.H. Wang, W.G. Zhu, O.K. Tan, Fall Meeting, Sol-Gel Derived PZT Thick Films with Nano-Sized Microstructure, MRS2002, Boston, 2002.
5. Zhao C.L., Wang Z.H., Zhu W.G., Yao X., Liu W.G. PZT thick films fabrication using a sol-gel based 0-3 composite processing. Int. J. Mod. Phys. B. 16:2002;242-248.
6. Zhu W.G., Wang Z.H., Zhao C.L., Tan O.K. Low temperature sintering of piezoelectric thick films derived from a novel sol-gel route. Jpn. J. Appl. Phys. 41:2002;11B.