Characterisation of ferroelectric PbZrXTi1-XO 3 (PZT) thin films prepared by liquid-delivery metalorganic chemical vapor deposition

Integrated Ferroelectrics

Volumn 81, Issue 1, 2006, Pages 289-295

  Matichyn, S ^a   Lisker, M ^a   Silinskas, M ^a   Garke, B ^a   Burte, E ^a  

^a OTTO VON GUERICKE UNIVERSITY   (Germany)

Author keywords

Ferroelectric; Liquid delivery MOCVD; PZT; Thin films

Indexed keywords

ANNEALING; CRYSTAL GROWTH; CRYSTAL STRUCTURE; LEAD COMPOUNDS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; X RAY DIFFRACTION ANALYSIS;

ANNEALING TEMPERATURE; LEAD ZIRCONIUM TITANATE (PZT); LEAF SHAPE CRYSTALS; LIQUID DELIVERY MOCVD;

FERROELECTRIC THIN FILMS;

EID: 33745863517     PISSN: 10584587     EISSN: 16078489     Source Type: Conference Proceeding    
DOI: 10.1080/10584580600663748     Document Type: Article

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