Ferroelectric thin and thick films for microsystems

Materials Science in Semiconductor Processing

Volumn 5, Issue 2-3, 2002, Pages 65-76

  Whatmore, R W ^a   Zhang, Q ^a   Huang, Z ^a   Dorey, R A ^a  

^a CRANFIELD UNIVERSITY   (United Kingdom)

Author keywords

Ferroelectrics; Microsystems; Piezoelectricity MEMS; Pyroelectricity; Thick films; Thin films

Indexed keywords

HYSTERESIS; INFRARED DETECTORS; LOW TEMPERATURE OPERATIONS; NUCLEATION; PEROVSKITE; PIEZOELECTRICITY; PYROELECTRICITY; SOL-GELS; THICK FILMS;

MICROSYSTEMS;

FERROELECTRIC THIN FILMS;

EID: 0036557750     PISSN: 13698001     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1369-8001(02)00085-9     Document Type: Conference Paper

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