Characterizing nanoimprint profile shape and polymer flow behavior using visible light angular scatterometry

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 25, Issue 6, 2007, Pages 2396-2401

  Al Assaad, Rayan M ^a   Regonda, Suresh ^a   Tao, Li ^a   Pang, Stella W ^b   Hu, Wenchuang ^a  

^a The University of Texas at Dallas   (United States)

^b UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANGULAR SCATTEROMETRY; POLYMER NANOSCALE GRATINGS;

GLASS TRANSITION; MATHEMATICAL MODELS; NANOSTRUCTURES; RESIDUAL STRESSES; THICKNESS MEASUREMENT;

POLYMETHYL METHACRYLATES;

EID: 37148998772     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2800327     Document Type: Article

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