A micromachined dual-backplate capacitive microphone for aeroacoustic measurements

Journal of Microelectromechanical Systems

Volumn 16, Issue 6, 2007, Pages 1289-1302

  Martin, David T ^a,b   Liu, Jian ^a,c   Kadirvel, Karthik ^a,d   Fox, Robert M ^e   Sheplak, Mark ^a   Nishida, Toshikazu ^a  

^a J Crayton Pruitt Family Department of Biomedical Engineering   (United States)

^b BROADCOM CORPORATION   (United States)

^c AdaptivEnergy Llc   (United States)

^d TEXAS INSTRUMENTS   (United States)

^e UNIVERSITY OF FLORIDA   (United States)

Author keywords

Acoustic measurements; Capacitive transducers; Micromachining; Microphones; Silicon micromachining

Indexed keywords

ACOUSTIC NOISE; ACOUSTIC VARIABLES MEASUREMENT; MICROMACHINING; NATURAL FREQUENCIES; TRANSDUCERS;

AEROACOUSTIC MEASUREMENTS; PLANARIZED-POLYSILICON; SILICON MICROMACHINING;

MICROPHONES;

EID: 36949030241     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2007.909234     Document Type: Article

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