A micromachined dual-backplate capacitive microphone for aeroacoustic measurements

Journal of Microelectromechanical Systems

Volumn 16, Issue 6, 2007, Pages 1289-1302

  Martin, David T ^a,b   Liu, Jian ^a,c   Kadirvel, Karthik ^a,d   Fox, Robert M ^e   Sheplak, Mark ^a   Nishida, Toshikazu ^a  

^a University of Florida   (United States)

^b BROADCOM CORPORATION   (United States)

^c AdaptivEnergy Llc   (United States)

^d TEXAS INSTRUMENTS   (United States)

^e UNIVERSITY OF FLORIDA   (United States)

Author keywords

Acoustic measurements; Capacitive transducers; Micromachining; Microphones; Silicon micromachining

Indexed keywords

ACOUSTIC NOISE; ACOUSTIC VARIABLES MEASUREMENT; MICROMACHINING; NATURAL FREQUENCIES; TRANSDUCERS;

AEROACOUSTIC MEASUREMENTS; PLANARIZED-POLYSILICON; SILICON MICROMACHINING;

MICROPHONES;

EID: 36949030241     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2007.909234     Document Type: Article

References (44)

1. "Aeronautics and space, noise standards: Aircraft type and airworthiness certification," Title 14 US Code of Federal Regulations, pt. 36, 2004.
2. T. J. Mueller, Aeroacoustic Measurements. Berlin, Germany: Springer-Verlag, 2002, pp. 158-179.
3. P. R. Scheeper, A. G. H. van der Donk, W. Olthuis, and P. Bergveld, "A review of silicon microphones," Sens. Actuators A, Phys., vol. 44, no. 1, pp. 1-11, Jul. 1994.
4. D. T. Blackstock, Fundamentals of Physical Acoustics. Hoboken, NJ: Wiley, 2000.
5. J. Eargle, The Microphone Handbook. London, U.K.: Butterworth-Heinemann, 2001.
6. P. R. Scheeper, B. Nordstrand, B. L. J. O. Gullov, T. Clausen, L. Midjord, and T. Storgaard-Larsen, "A new measurement microphone based on MEMS technology," J. Microelectromech. Syst., vol. 12, no. 6, pp. 880-891, Dec. 2003.
7. D. P. Arnold, T. Nishida, L. N. Cattafesta, and M. Sheplak, "A directional acoustic array using silicon micromachined piezoresistive microphones," J. Acoust. Soc. Amer., vol. 113, no. 1, pp. 289-298, Jan. 2003.
8. S.D. Senturia, Microsystem Design. Norwell, MA: Kluwer, 2001.
9. R. Schellin and G. Hess, "A silicon subminiature microphone based on piezoresistive polysilicon strain gauges," Sens. Actuators A, Phys. vol. 32, no. 1-3, pp. 555-559, 1992.
10. E. Kälvesten, L. Lofdahl, and G. Stemme, "A small-size silicon microphone for measurements in turbulent gas flows," Sens. Actuators A, Phys., vol. 45, no. 2, pp. 103-108, Nov. 1994.
11. D. P. Arnold, S. Gururaj, S. Bhardwaj, T. Nishida, and M. Sheplak, "A piezoresistive microphone for aeroacoustic measurements," in Proc. ASME IMECE, 2001, pp. 281-288.
12. C. Huang, A. Naguib, E. Soupos, and K. Najafi, "A silicon micromachined microphone for fluid mechanics research," J. Micromech. Microeng. vol. 12, no. 6, pp. 767-774, Nov. 2002.
13. M. Royer, J. O. Holmen, M. A. Wurm, O. S. Aadland, and M. Glenn, "ZnO on Si integrated acoustic sensor," Sens. Actuators, vol. 4, no. 3, pp. 357-362, 1983.
14. R. P. Ried, E. S. Kim, D. M. Hong, and R. S. Muller, "Piezoelectric microphone with on-chip CMOS circuits," J. Microelectromech. Syst. vol. 2, no. 3, pp. 111-120, 1993.
15. W. H. Hsieh, T. Y. Hsu, and Y C. Tai, "A micromachined thin-film Teflon electret microphone," in Proc. Int. Conf. Solid State Sensors Actuators, TRANSDUCERS, Chicago, IL, Jun. 16-19, 1997, vol. 1, pp. 425-428.
16. S. Horowitz, T. Nishida, L. Cattafesta, and M. Sheplak, "A micromachined piezoelectric microphone for aeroacoustics applications," in Proc. Solid-State Sensor Actuator Workshop, Hilton Head Island, SC, 2006, pp. 31-36.
17. K. Kadirvel, R. Taylor, S. Horowitz, M. Sheplak, and T. Nishida, "Design and characterization of MEMS optical microphone for aeroacoustic measurement," presented at the 42nd Aerospace Sciences Meeting and Exhibit, Reno, NV, 2004, AIAA Paper #2004-1030.
18. N. A. Hall, B. Bicen, M. K. Jeelani, W. Lee, S. Qureshi, and F. L. Degertekin, "Micromachmed microphones with diffraction-based optical displacement detection," J. Acoust. Soc. Amer., vol. 118, no. 5, pp. 3000-3009, Nov. 2005.
19. D. Hohm and R. G. Multhaupt, "Silicon-dioxide electret transducer," J. Acoust. Soc. Amer., vol. 75, no. 4, pp. 1297-1298, Apr. 1984.
20. P. R. Scheeper, W. Olthuis, and P. Bergveld, "Fabrication of a subminiature silicon condenser microphone using the sacrificial layer technique," in Proc. Int. Conf. Solid-State Sens. Actuators, 1991, pp. 408-411.
21. P. Rombach, M. Mullenborn, U. Klein, and K. Rasmussen, "The first low voltage, low noise differential silicon microphone, technology development and measurement results," Sens. Actuators A, Phys., vol. 95, no. 2/3, pp. 196-201, 2002.
22. P. V. Loeppert and S. B. Lee, "SiSonic - The first commercialized MEMS microphone," in Proc. Solid-State Sensor Actuator Workshop, Hilton Head Island, SC, 2006, pp. 27-30.
23. Brüel and Kjær, Product Data, Condenser Microphone Cartridges - Types 4133 to 4181, p. 6. Online. Available: http://www.bksv.com/pdf/Bp0100.pdf
24. J. Hillenbrand and G. M. Sessler, "High-sensitivity piezoelectric microphones based on stacked cellular polymer films (L)," J. Acoust. Soc. Amer., vol. 116, no. 6, pp. 3267-3270, Dec. 2004.
25. R. Kessmann, M. Klaiber, and G. Hess, "Silicon condenser microphones with corrugated silicon oxide/nitride electret membranes," Sens. Aetnators A, Phys., vol. 100, no. 2/3, pp. 301-309, Sep. 2002.
26. S. T. Hansen, A. S. Ergun, W. Liou, B. A. Auld, and B. T. Khuri-Yakub, "Wideband micromachined capacitive microphones with radio frequency detection," J. Acoust. Soc. Amer., vol. 116, no. 2, pp. 828-842, Aug. 2004.
27. F. V. Hunt, Electroacoustics: The Analysis of Transduction, and Its Historical Background. College Park, MD: Amer. Inst. Phys., 1954.
28. J. J. Bernstein, "Acoustic Transducer," U.S. Patent 5 146435, Sep. 18, 1992.
29. J. Bay, O. Hansen, and S. Bouwstra, "Micromachined double backplate differential capacitive microphone," J. Micromech. Microeng., vol. 9, no. 1, pp. 30-33, Mar. 1999.
30. J. Bay, O. Hansen, and S. Bouwstra, "Design of a silicon microphone with differential read-out of a sealed double parallel-plate capacitor," Sens. Actuators A, Phys., vol. 53, no. 1-3, pp. 232-236, May 1996.
31. D. T. Martin, K. Kadirvel, J. Liu, R. M. Fox, M. Sheplak, and T. Nishida, "Surface and bulk micromachined dual back-plate condenser microphone," in Proc. 18th IEEE Int. Conf. MEMS, Miami, FL, 2005, pp. 319-322.
32. D. T. Martin, J. Liu, K. Kadirvel, R. M. Fox, M. Sheplak, and T. Nishida, "Development of a MEMS dual backplate capacitive microphone for aeroacoustic measurements," presented at the 44th AIAA Aerospace Sciences Meeting Exhibit, Reno, NV, 2006, AIAA Paper #2006-1246.
33. S. Timoshenko and S. Woinowsky-Krieger, Theory of Plates and Shells New York: McGraw-Hill, 1959.
34. M. Sheplak and J. Dugundji, "Large deflections of clamped circular plates under tension and transitions to membrane behavior," J. Appl. Mech., vol. 65, no. 1, pp. 107-115, 1998.
35. M. Rossi, Acoustics and Electroacoustics. Norwood, MA: Artech House, 1988, ch. 5/6.
36. Z. Skvor, "On the acoustical resistance to viscous losses in the air gap of electrostatic transducers," Acoustica, vol. 19, pp. 295-299, 1967.
37. D. Homentcovschi and R. N. Miles, "Modeling of viscous damping of perforated planar microstructures. Applications in acoustics," J. Acoust. Soc. Amer., vol. 116, no. 5, pp. 2939-2947, Nov. 2004.
38. R. W. Fox, A. T. McDonald, and P. J. Pritchard, Introduction to Fluid Mechanics, 6th ed. New York: Wiley, 2004, ch. 8.
39. J. J. Sniegowski and M. S. Rodgers, "Multi-layer enhancement to polysilicon surface-micromachining technology," in Proc. IEDM Tech. Dig., 1997, pp. 903-906.
40. T. B. Gabrielson, "Mechanical-thermal noise in micromachmed acoustic and vibration sensors," IEEE Trans. Electron Devices, vol. 40, no. 5, pp. 903-909, May 1993.
41. G. T. Mulhern, D. S. Soane, and R. T. Howe, "Supercritical carbon dioxide drying of microstructures," in Proc. Int. Conf. Solid-State Sens. Actuators, 1993, pp. 296-299.
42. J. Liu, D. Martin, K. Kadirvel, T. Nishida, L. Cattafesta, M. Sheplak, and B. P. Mann, "Nonlinear model and system identification of a capacitive dual-backplate MEMS microphone," J. Sound Vib., vol. 309, pp. 276-292.
43. R. Dieme, G. Bosman, M. Sheplak, and T. Nishida, "Source of excess noise in silicon piezoresistive microphones," J. Acoust. Soc. Amer. vol. 119, no. 5, pp. 2710-2720, May 2006.
44. T. Schultz, L. Cattafesta, and M. Sheplak, "Modal decomposition method for acoustic impedance testing square ducts," J. Acoust. Soc. Amer. vol. 120, no. 6, pp. 3750-3758, Dec. 2006.