Design of a silicon microphone with differential read-out of a sealed double parallel-plate capacitor

Sensors and Actuators, A: Physical

Volumn 53, Issue 1-3, 1996, Pages 232-236

  Bay, Jesper ^a,b   Hansen, Ole ^a   Bouwstra, Siebe ^a  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

^b Microtronic A/S   (Denmark)

Author keywords

Capacitive; Feedback; FEM modelling; Force balancing; Microphones; Wafer bonding

Indexed keywords

EID: 0001023405     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/0924-4247(96)01129-6     Document Type: Article

References (8)

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