Micromachined double backplate differential capacitive microphone

Journal of Micromechanics and Microengineering

Volumn 9, Issue 1, 1999, Pages 30-33

  Jesper, Bay ^a,c   Hansen, Ole ^b   Bouwstra, Siebe ^b  

^a Microtronic A/S   (Denmark)

^b T U Denmark ^*  (Denmark)

^c DELTA Danish Electronics Light & Acoustics   (Denmark)

Author keywords

[No Author keywords available]

Indexed keywords

ATMOSPHERIC HUMIDITY; CONTAMINATION; DESIGN; DIAPHRAGMS; ELECTRIC POTENTIAL; MATHEMATICAL MODELS; MICROMACHINING; PERFORMANCE; PREVENTION;

AIR GAP; DOUBLE BACKPLATE DIFFERENTIAL CAPACITIVE MICROPHONE; FORCE BALANCING;

MICROPHONES;

EID: 0344211020     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/9/1/003     Document Type: Article

References (8)

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2. Bergqvist J 1994 Modelling and micromachining of capacitive microphones PhD Thesis Uppsala University
3. Bernstein J J and Borenstein J T 1996 A micromachined silicon condenser microphone with on-chip amplifier Proc. Solid-State Sensor and Actuator Workshop (Hilton Head. SC, 1996) pp 239-43
4. Bay J, Hansen O and Bouwstra S 1996 Design of a silicon microphone with differential read-out of a sealed parallel-plate capacitor Sensors Actuators A 53 232-6
5. Bay J 1997 Silicon microphone for hearing aid applications PhD Thesis Mikroelektronik Centret, Technical University of Denmark
6. Bay J, Hansen O and Bouwstra S 1995 Modelling of micromachined microphones with differential capacitive read-out and force balancing MME '95 Technical Digest (Copenhagen, 1995) pp 221-4
7. Bay J, Hansen O and Bouwstra S 1997 Quasi-static analyses of square diaphragms and capacitive microphones using finite element calculation MME '97 Digest of Technical Papers (Southampton, 1997)
8. Fürst C E 1997 Low power/low voltage interface circuitry for capacitive sensors, design, optimization, and applications PhD Thesis Technical University of Denmark