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Volumn 116, Issue 5, 2004, Pages 2939-2947

Modeling of viscous damping of perforated planar microstructures. Applications in acoustics

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; ACOUSTICS; GRAPH THEORY; INTERFEROMETERS; MICROELECTROMECHANICAL DEVICES; MICROPHONES; MICROSENSORS; MICROSTRUCTURE; RESONATORS; SWITCHES;

EID: 9744280447     PISSN: 00014966     EISSN: None     Source Type: Journal    
DOI: 10.1121/1.1798331     Document Type: Article
Times cited : (66)

References (14)
  • 1
    • 0027845372 scopus 로고
    • Finite-element modeling and characterization of a silicon condenser microphone with a highly perforated backplate
    • J. Bergquist, "Finite-element modeling and characterization of a silicon condenser microphone with a highly perforated backplate," Sens. Actuators, A 39, 191-200 (1993).
    • (1993) Sens. Actuators, A , vol.39 , pp. 191-200
    • Bergquist, J.1
  • 2
    • 0001635516 scopus 로고
    • On acoustical resistance due to viscous losses in the air gap of electrostatic transducers
    • Z. Skvor, "On acoustical resistance due to viscous losses in the air gap of electrostatic transducers," Acustica 19, 295-297 (1967-1968).
    • (1967) Acustica , vol.19 , pp. 295-297
    • Skvor, Z.1
  • 3
    • 0026152012 scopus 로고
    • Micromachined capacitive accelerometer
    • U. E. Gerlach-Mayer, "Micromachined capacitive accelerometer," Sens. Actuators, A 25-27, 555-558 (1991).
    • (1991) Sens. Actuators, A , vol.25-27 , pp. 555-558
    • Gerlach-Mayer, U.E.1
  • 10
    • 0029753966 scopus 로고    scopus 로고
    • Widely and continuously tunable micromachined resonant cavity detector with wavelength tracking
    • M. S. Wu, E. C. Vail, G. S. Li, W. Yuen, and C. J. Chang-Hasnain, "Widely and continuously tunable micromachined resonant cavity detector with wavelength tracking," IEEE Photon Technol. Lett. 8, 98-100 (1996).
    • (1996) IEEE Photon Technol. Lett. , vol.8 , pp. 98-100
    • Wu, M.S.1    Vail, E.C.2    Li, G.S.3    Yuen, W.4    Chang-Hasnain, C.J.5
  • 11
    • 0032627176 scopus 로고    scopus 로고
    • Effect of holes and edges on the squeeze film damping of perforated micromechanical structures
    • Trans. Circuits and Systems II, TCAS 1999
    • E.-S. Kim, Y.-H. Cho, and M-U. Kim, "Effect of holes and edges on the squeeze film damping of perforated micromechanical structures," IEEE, Int. Conf. MEMS, 1999, Trans. Circuits and Systems II, TCAS 1999.
    • (1999) IEEE, Int. Conf. MEMS
    • Kim, E.-S.1    Cho, Y.-H.2    Kim, M.-U.3
  • 13
    • 33646663640 scopus 로고    scopus 로고
    • Viscous damping of perforated planar micromechanical structures
    • in press
    • D. Homentcovschi and R. Miles, "Viscous damping of perforated planar micromechanical structures," Sensors and Actuators A (in press).
    • Sensors and Actuators A
    • Homentcovschi, D.1    Miles, R.2
  • 14
    • 0023310160 scopus 로고
    • Some developments of the CVBEM application to the mixed boundary value problems for the Laplace equation
    • D. Homentcovschi, D. Cocora, and R. Magureanu, "Some developments of the CVBEM application to the mixed boundary value problems for the Laplace equation," Eng. Anal. 4, 15-20 (1987).
    • (1987) Eng. Anal. , vol.4 , pp. 15-20
    • Homentcovschi, D.1    Cocora, D.2    Magureanu, R.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.