-
1
-
-
0027845372
-
Finite-element modeling and characterization of a silicon condenser microphone with a highly perforated backplate
-
J. Bergquist, "Finite-element modeling and characterization of a silicon condenser microphone with a highly perforated backplate," Sens. Actuators, A 39, 191-200 (1993).
-
(1993)
Sens. Actuators, A
, vol.39
, pp. 191-200
-
-
Bergquist, J.1
-
2
-
-
0001635516
-
On acoustical resistance due to viscous losses in the air gap of electrostatic transducers
-
Z. Skvor, "On acoustical resistance due to viscous losses in the air gap of electrostatic transducers," Acustica 19, 295-297 (1967-1968).
-
(1967)
Acustica
, vol.19
, pp. 295-297
-
-
Skvor, Z.1
-
3
-
-
0026152012
-
Micromachined capacitive accelerometer
-
U. E. Gerlach-Mayer, "Micromachined capacitive accelerometer," Sens. Actuators, A 25-27, 555-558 (1991).
-
(1991)
Sens. Actuators, A
, vol.25-27
, pp. 555-558
-
-
Gerlach-Mayer, U.E.1
-
8
-
-
0031645672
-
Micromechanical electrostatic K-band switches
-
Baltimore, Maryland, 7-12 June
-
S. Pacheco, C. T.-C. Nguyen, and L. P. B. Katehi, "Micromechanical electrostatic K-band switches," Proceedings IEEE, MTT-S International Microwave Symposium, Baltimore, Maryland, 7-12 June, 1998, pp. 1569-1572.
-
(1998)
Proceedings IEEE, MTT-S International Microwave Symposium
, pp. 1569-1572
-
-
Pacheco, S.1
Nguyen, C.T.-C.2
Katehi, L.P.B.3
-
9
-
-
9744263422
-
Air damping in resonant micromechanical capacitive sensors
-
(Copenhagen), Aug.
-
T. Mattila, P. Hakkinen, O. Jaakola, J. Kiihamāki, J. Kyynārāinen, A. Oja, H. Seppā, P. Seppālā, and T. Sillanpāā, "Air damping in resonant micromechanical capacitive sensors," in 14th European Conference on Solid-State Transducers, EUROSENSORS XIV (Copenhagen), pp. 221-224, Aug. 2000.
-
(2000)
14th European Conference on Solid-State Transducers, EUROSENSORS XIV
, pp. 221-224
-
-
Mattila, T.1
Hakkinen, P.2
Jaakola, O.3
Kiihamaki, J.4
Kyynarainen, J.5
Oja, A.6
Seppa, H.7
Seppala, P.8
Sillanpaa, T.9
-
10
-
-
0029753966
-
Widely and continuously tunable micromachined resonant cavity detector with wavelength tracking
-
M. S. Wu, E. C. Vail, G. S. Li, W. Yuen, and C. J. Chang-Hasnain, "Widely and continuously tunable micromachined resonant cavity detector with wavelength tracking," IEEE Photon Technol. Lett. 8, 98-100 (1996).
-
(1996)
IEEE Photon Technol. Lett.
, vol.8
, pp. 98-100
-
-
Wu, M.S.1
Vail, E.C.2
Li, G.S.3
Yuen, W.4
Chang-Hasnain, C.J.5
-
11
-
-
0032627176
-
Effect of holes and edges on the squeeze film damping of perforated micromechanical structures
-
Trans. Circuits and Systems II, TCAS 1999
-
E.-S. Kim, Y.-H. Cho, and M-U. Kim, "Effect of holes and edges on the squeeze film damping of perforated micromechanical structures," IEEE, Int. Conf. MEMS, 1999, Trans. Circuits and Systems II, TCAS 1999.
-
(1999)
IEEE, Int. Conf. MEMS
-
-
Kim, E.-S.1
Cho, Y.-H.2
Kim, M.-U.3
-
13
-
-
33646663640
-
Viscous damping of perforated planar micromechanical structures
-
in press
-
D. Homentcovschi and R. Miles, "Viscous damping of perforated planar micromechanical structures," Sensors and Actuators A (in press).
-
Sensors and Actuators A
-
-
Homentcovschi, D.1
Miles, R.2
-
14
-
-
0023310160
-
Some developments of the CVBEM application to the mixed boundary value problems for the Laplace equation
-
D. Homentcovschi, D. Cocora, and R. Magureanu, "Some developments of the CVBEM application to the mixed boundary value problems for the Laplace equation," Eng. Anal. 4, 15-20 (1987).
-
(1987)
Eng. Anal.
, vol.4
, pp. 15-20
-
-
Homentcovschi, D.1
Cocora, D.2
Magureanu, R.3
|