Silicon condenser microphones with corrugated silicon oxide/nitride electret membranes

Sensors and Actuators, A: Physical

Volumn 100, Issue 2-3, 2002, Pages 301-309

  Kressmann, R ^a   Klaiber, M ^a   Hess, G ^a  

^a DARMSTADT UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Acoustic transducer; Condenser microphone; Corrugated membrane; Electret; LOCOS

Indexed keywords

ACOUSTIC TRANSDUCERS; DIAPHRAGMS; DRY ETCHING; ELECTRETS; HARMONIC DISTORTION; MEMBRANES; MICROMACHINING; SEMICONDUCTING SILICON; SILICON NITRIDE; SPURIOUS SIGNAL NOISE;

CONDENSER MICROPHONES; CORRUGATED MEMBRANES;

MICROPHONES;

EID: 0036724913     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(02)00137-1     Document Type: Article

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