A micromachined piezoelectric microphone for aeroacoustics applications

Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

Volumn , Issue , 2006, Pages 31-36

  Horowitz, Stephen ^a   Nishida, Toshikazu ^a   Cattafesta, Louis ^a   Sheplak, Mark ^a  

^a UNIVERSITY OF FLORIDA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; AEROACOUSTICS; LEAD ZIRCONATE TITANATE; MICROPHONES; MICROSYSTEMS; NATURAL FREQUENCIES; PIEZOELECTRIC DEVICES; PIEZOELECTRICITY; REACTIVE ION ETCHING; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS; SOL-GEL PROCESS; SOL-GELS;

AEROACOUSTICS APPLICATIONS; BULK-MICROMACHINED; DEEP REACTIVE ION ETCHING; DEPOSITION PROCESS; EXPERIMENTAL CHARACTERIZATION; ORDERS OF MAGNITUDE; PIEZOELECTRIC MICROPHONES; SILICON ON INSULATOR WAFERS;

SOLID-STATE SENSORS;

EID: 84954365285     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (14)

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