Micromachined thin-film Teflon electret microphone

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 1, Issue , 1997, Pages 425-428

  Hsieh, Wen H ^a   Hsu, Tseng Yang ^a   Tai, Yu Chong ^a  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRETS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; POLYTETRAFLUOROETHYLENES; THIN FILM DEVICES;

MICROMACHINED THIN FILM TEFLON ELECTRET MICROPHONE;

MICROPHONES;

EID: 0030702609     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)