Large deflections of clamped circular plates under initial tension and transitions to membrane behavior

Journal of Applied Mechanics, Transactions ASME

Volumn 65, Issue 1, 1998, Pages 107-115

  Sheplak, M ^a,b   Dugundji, J ^a  

^a Massachusetts Institute of Technology Cambridge   (United States)

^b University of Florida   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001167230     PISSN: 00218936     EISSN: 15289036     Source Type: Journal    
DOI: 10.1115/1.2789012     Document Type: Article

References (17)

1. Allen, M. G., 1986, “Measurement of Mechanical Properties and Adhesion of Thin Polyimide Films,” M.S. thesis, MIT, Cambridge, MA.
2. Abramowitz, M., and Stegun, I. A., 1972, Handbook of Mathematical Functions, 9th Ed., Dover, New York.
3. Anderson, D. A., Tannehill, J. C., and Pletcher, R. H., 1984, Computational Fluid Mechanics and Heat Transfer, Hemisphere, New York.
4. Chau, H.-L. and Wise, K. D., 1987, “Scaling Limits in Batch-Fabricated Silicon Pressure Sensors,” IEEE Transaction of Electron Devices, Vol. ED-34, pp. 850-858.
5. Cho, S. T., Najafi, K., and Wise, K. D., 1992, “Internal Stress Compensation and Scaling in Ultra-sensitive Silicon Pressure Sensors,” IEEE Transaction of Electron Devices, Vol. 39, No. 4, pp. 836-842.
6. Clark, S. K., and Wise, K. D., 1979, “Pressure Sensitivity in Anisotropic ally Etched Thin-Diaphragm Pressure Sensors,” IEEE Transaction of Electron Devices, Vol. ED-26, No. 12, pp. 1887-1896.
7. Friedrichs, K. O., 1949, “The Edge Effect In Bending and Buckling with Large Deflections,” Proceedings of Symposia in Applied Mathematics, Vol. 1 (NonLinear Problems in Mechanics of Continua), American Mathematical Society, New York, pp. 188-193.
8. Löfdahl, L., Kälvesten, E., and Stemme, G., 1994, “Small Silicon Based Pressure Transducers for Measurements in Turbulent Boundary Layers,” Experiments in Fluids, Vol. 17, pp. 24-31.
9. McPherson, A., Ramberg, W., and Levy, S., 1942, “Normal-Pressure Tests of Circular Plates with Clamped Edge,” NACA Technical Report 744.
10. Nädai, A., 1925, Elastisclie Platten, Julius Springer, Berlin, p. 288.
11. Roberts, G. O., 1971, “Computational Meshes for Boundary Layer Problems,” Lecture Notes in Physics, Vol. 8, Springer-Verlag, New York, pp. 171-177.
12. Schellin, R., and Hess, G., 1992, “A Silicon Subminiature Microphone Based on Piezoresistive Polysilicon Strain Gauges,” Sensors and Actuators A, Vol. 32, pp. 555-559.
13. Sze, S. M., 1994, Semiconductor Sensors, John Wiley and Sons, New York.
14. Timoshenko, S. P., and Woinowsky-Krieger, S., 1959, Theory of Plates and Shells, 2nd Ed., McGraw-Hill, New York.
15. Voorthuyzen, J. A., and Bergveld, P., 1984, “The Influence of Tensile Forces on the Deflection of Circular Diaphragms in Pressure Sensors,” Sensors and Actuators A, Vol. 6, pp. 201-213.
16. Way, S., 1934, “Bending of Circular Plates with Large Deflection,” Transactions of the ASME, Vol. 56, pp. 627-636.
17. Zhen, X., and Zhou, Y., 1990, “Analytical Formulas of Solutions of Geometrically Nonlinear Equations of Ax symmetric Plates and Shallow Shells,” Acta Mechanica Sinca, Vol. 6, No. 1.