A piezoresistive microphone for aeroacoustic measurements

American Society of Mechanical Engineers, Micro-Electromechanical Systems Division Publication (MEMS)

Volumn 3, Issue , 2001, Pages 281-288

  Arnold, David P ^a   Gururaj, Sridhar ^a   Bhardwaj, Sunil ^a   Nishida, Toshikazu ^a   Sheplak, Mark ^a  

^a University of Florida   (United States)

Author keywords

Drift; MEMS; Microphone; Noise; Piezoresistor

Indexed keywords

AEROACOUSTIC MEASUREMENTS; PIEZORESISTIVE MICROPHONE;

ACOUSTIC NOISE; BANDWIDTH; ELECTRIC POTENTIAL; MICROPHONES; PRODUCT DESIGN; RESISTORS; SILICON; SILICON NITRIDE; WIND TUNNELS;

MICROELECTROMECHANICAL DEVICES;

EID: 1542747847     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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