Micromachined microphones with diffraction-based optical displacement detection

Journal of the Acoustical Society of America

Volumn 118, Issue 5, 2005, Pages 3000-3009

  Hall, Neal A ^a,b   Bicen, Baris ^a   Jeelani, M Kamran ^a   Lee, Wook ^a   Qureshi, Shakeel ^a   Degertekin, F Levent ^a   Okandan, Murat ^b  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^b SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC IMPEDANCE; ACOUSTIC WAVE DIFFRACTION; ALGORITHMS; INTERFEROMETRY; MICROMACHINING; OPTOELECTRONIC DEVICES;

BEAMSPLITTERS; DIFFRACTION-BASED OPTICAL DISPLACEMENT; FOCUSING OPTICS; MICROMACHINED MICROPHONES;

MICROPHONES;

ACOUSTIC IMPEDANCE; ACOUSTICS; ALGORITHM; ARTICLE; CALIBRATION; DEVICE; DIFFRACTION; ELECTRODE; MATHEMATICAL ANALYSIS; MEASUREMENT; MICROPHONE; NOISE; OPTICS; PRIORITY JOURNAL; SEMICONDUCTOR; SOUND PRESSURE;

EID: 27744538633     PISSN: 00014966     EISSN: None     Source Type: Journal    
DOI: 10.1121/1.2062429     Document Type: Article

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