A new measurement microphone based on MEMS technology

Journal of Microelectromechanical Systems

Volumn 12, Issue 6, 2003, Pages 880-891

  Scheeper, Patrick Richard ^a   Nordstrand, Børge ^b   Gulløv, Jens Ole ^b   Liu, Bin ^b   Clausen, Thomas ^c   Midjord, Lise ^d   Storgaard Larsen, Torben ^e  

^a Sonion A/S   (Denmark)

^b Bruel & Kjaer Danmark   (Denmark)

^c Topsil Semiconductor Materials AS   (Denmark)

^d Capres AS   (Denmark)

^e NOVO NORDISK A S   (Denmark)

Author keywords

Acoustic transducers; Environmental testing; Finite element methods; Microphones; Noise; Packaging

Indexed keywords

ACOUSTIC TRANSDUCERS; ELECTRONICS PACKAGING; ENVIRONMENTAL TESTING; FINITE ELEMENT METHOD; FREQUENCY RESPONSE; MICROPHONES; PRESSURE; SEMICONDUCTING SILICON; SPURIOUS SIGNAL NOISE; TEMPERATURE; VIBRATIONS (MECHANICAL);

NOISE LEVEL; STATIC PRESSURE;

MICROELECTROMECHANICAL DEVICES;

EID: 0742303999     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2003.820260     Document Type: Article

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